Progress and outlook for MRAM technology

被引:363
作者
Tehrani, S [1 ]
Slaughter, JM [1 ]
Chen, E [1 ]
Durlam, M [1 ]
Shi, J [1 ]
DeHerrera, M [1 ]
机构
[1] Motorola Labs, Phys Sci Res Labs, Tempe, AZ 85284 USA
关键词
giant magnetoresistance; GMR; magnetic tunnel junction; MTJ; magnetoresistive random access memory; MRAM;
D O I
10.1109/20.800991
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
We summarize the features of existing semiconductor memories and compare them to Magnetoresistive Random Access Memory (MRAM), a semiconductor memory with magnetic bits for nonvolatile storage. MRAM architectures based on Giant Magnetoresistance (GMR) and Magnetic Tunnel Junction (MTJ) cells are described, This paper will discuss our progress on improving the material structures, memory bits, thermal stability of the bits, and competitive architectures for GMR and MTJ based MRAM memories as well as the potential of these memories in the commercial memory market.
引用
收藏
页码:2814 / 2819
页数:6
相关论文
共 19 条
[1]   GIANT MAGNETORESISTANCE OF (001)FE/(001) CR MAGNETIC SUPERLATTICES [J].
BAIBICH, MN ;
BROTO, JM ;
FERT, A ;
VANDAU, FN ;
PETROFF, F ;
EITENNE, P ;
CREUZET, G ;
FRIEDERICH, A ;
CHAZELAS, J .
PHYSICAL REVIEW LETTERS, 1988, 61 (21) :2472-2475
[2]   Submicron spin valve magnetoresistive random access memory cell [J].
Chen, EY ;
Tehrani, S ;
Zhu, T ;
Durlam, M ;
Goronkin, H .
JOURNAL OF APPLIED PHYSICS, 1997, 81 (08) :3992-3994
[3]   Spin-valve structures with NiO pinning layers [J].
Cowache, C ;
Dieny, B ;
Auffret, S ;
Cartier, M ;
Taylor, RH ;
O'Barr, R ;
Yamamoto, SY .
IEEE TRANSACTIONS ON MAGNETICS, 1998, 34 (04) :843-845
[4]   Optimizing the giant magnetoresistance of symmetric and bottom spin valves [J].
Egelhoff, WF ;
Chen, PJ ;
Powell, CJ ;
Stiles, MD ;
McMichael, RD ;
Lin, CL ;
Sivertsen, JM ;
Judy, JH ;
Takano, K ;
Berkowitz, AE ;
Anthony, TC ;
Brug, JA .
JOURNAL OF APPLIED PHYSICS, 1996, 79 (08) :5277-5281
[5]   Microstructured magnetic tunnel junctions [J].
Gallagher, WJ ;
Parkin, SSP ;
Lu, Y ;
Bian, XP ;
Marley, A ;
Roche, KP ;
Altman, RA ;
Rishton, SA ;
Jahnes, C ;
Shaw, TM ;
Xiao, G .
JOURNAL OF APPLIED PHYSICS, 1997, 81 (08) :3741-3746
[6]   Tunnel oxide and ETOX™ flash scaling limitation [J].
Lai, S .
SEVENTH BIENNIAL IEEE INTERNATIONAL NONVOLATILE MEMORY TECHNOLOGY CONFERENCE, PROCEEDINGS, 1998, :6-7
[7]  
MCMICHAEL RD, 1995, P MAGN ULTR FILMS MU, P397
[8]   GIANT MAGNETIC TUNNELING EFFECT IN FE/AL2O3/FE JUNCTION [J].
MIYAZAKI, T ;
TEZUKA, N .
JOURNAL OF MAGNETISM AND MAGNETIC MATERIALS, 1995, 139 (03) :L231-L234
[9]   LARGE MAGNETORESISTANCE AT ROOM-TEMPERATURE IN FERROMAGNETIC THIN-FILM TUNNEL-JUNCTIONS [J].
MOODERA, JS ;
KINDER, LR ;
WONG, TM ;
MESERVEY, R .
PHYSICAL REVIEW LETTERS, 1995, 74 (16) :3273-3276
[10]   OSCILLATORY MAGNETIC EXCHANGE COUPLING THROUGH THIN COPPER LAYERS [J].
PARKIN, SSP ;
BHADRA, R ;
ROCHE, KP .
PHYSICAL REVIEW LETTERS, 1991, 66 (16) :2152-2155