Photoluminescence and chemical bonding in porous silicon layers - Dependence on the P concentration in the Si substrate

被引：10

作者：

DimovaMalinovska, D ^{[1
]}

Kamenova, M ^{[1
]}

SendovaVassileva, M ^{[1
]}

Marinova, T ^{[1
]}

Krastev, V ^{[1
]}

机构：

[1] BULGARIAN ACAD SCI,INST GEN & INORGAN CHEM,BU-1113 SOFIA,BULGARIA

来源：

THIN SOLID FILMS | 1996年 / 276卷 / 1-2期

关键词：

luminescence; electron microscopy; silicon; X-ray photoelectron spectroscopy;

D O I：

10.1016/0040-6090(95)08064-3

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

Correlation between the photoluminescence (PL), porosity, crystallite size and chemical bonds in porous silicon (PS) prepared by electrochemical etching of Si with different levels of phosphorus doping has been studied. PL is very strongly related to the chemical bonding and depends on the Si, O and C content which is different for PS prepared on Si substrates with different resistivities. The influence of the doping level of Si on the process of electrochemical etching is discussed.

引用

页码：248 / 252

页数：5

共 19 条

[1] A MICROSTRUCTURAL STUDY OF POROUS SILICON
BERBEZIER, I
HALIMAOUI, A
[J]. JOURNAL OF APPLIED PHYSICS, 1993, 74 (09) : 5421 - 5425
[2] BURGER RM, 1967, FUNDAMENTALS SI INTE, V1
[3] SILICON QUANTUM WIRE ARRAY FABRICATION BY ELECTROCHEMICAL AND CHEMICAL DISSOLUTION OF WAFERS
CANHAM, LT
[J]. APPLIED PHYSICS LETTERS, 1990, 57 (10) : 1046 - 1048
[4] WAVELENGTH DEPENDENCE IN PHOTOSYNTHESIS OF POROUS SILICON DOT
CHEAH, KW
CHOY, CH
[J]. SOLID STATE COMMUNICATIONS, 1994, 91 (10) : 795 - 797
[5] PREFERENTIAL PROPAGATION OF PORES DURING THE FORMATION OF POROUS SILICON - A TRANSMISSION ELECTRON-MICROSCOPY STUDY
CHUANG, SF
COLLINS, SD
SMITH, RL
[J]. APPLIED PHYSICS LETTERS, 1989, 55 (07) : 675 - 677
[6] Colthup N.B., 1990, INTRO IR RAMAN SPECT
[7] DIMOVAMALINOVSK.D, 1995, IN PRESS SOLID STATE
[8] DIMOVAMALINOVSK.D, IN PRESS APPL SURF S
[9] CORRELATION BETWEEN THE PHOTOLUMINESCENCE AND CHEMICAL BONDING IN POROUS SILICON
DIMOVAMALINOVSKA, D
SENDOVAVASSILEVA, M
MARINOVA, T
KRASTEV, V
KAMENOVA, M
TZENOV, N
[J]. THIN SOLID FILMS, 1995, 255 (1-2) : 191 - 195
[10] KANEMITSU Y, 1993, MATER RES SOC S P, V298, P285

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