Absolute shape measurements using high-resolution optoelectronic holography methods

Characterization of surface shape and deformation is of primary importance in a number of testing and metrology applications related to the functionality, performance, and integrity of components. in this paper, a unique, compact, and versatile state-of-the-art fiber-optic-based optoelectronic holography (OEH) methodology is described. This description addresses apparatus and analysis algorithms, especially developed to perform measurements of both absolute surface shape and deformation. The OEH can be arranged in multiple configurations, which include the three-camera, three-illumination, and in-plane speckle correlation setups. With the OEH apparatus and analysis algorithms, absolute shape measurements can be made, using present setup, with a spatial resolution and accuracy of better than 30 and 10 mu m, respectively, for volumes characterized by a 300-mm length. Optimizing the experimental setup and incorporating equipment, as it becomes available, having superior capabilities to the ones utilized in the present investigations can further increase resolution and accuracy in the measurements. The particular feature of this methodology is its capability to export the measurements data directly into CAD environments for subsequent processing, analysis, and definition of CAD/CAE models. (C) 2000 Society of Photo-Optical instrumentation Engineers. [S0091-3286(00)02601-5].