Field emission studies of diamond-like films grown by RFCVD

被引：17

作者：

Lue, JT

Chen, SY

Chen, CL

Lin, MC

机构：

[1] Natl Tsing Hua Univ, Dept Phys, Hsinchu 300, Taiwan

[2] Natl Tsing Hua Univ, Dept Elect Engn, Hsinchu 300, Taiwan

来源：

JOURNAL OF NON-CRYSTALLINE SOLIDS | 2000年 / 265卷 / 03期

关键词：

D O I：

10.1016/S0022-3093(00)00006-5

中图分类号：

TQ174 [陶瓷工业]; TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

Hydrogenated amorphous carbon films (a-C:H) prepared by radio-frequency plasma-enhanced chemical vapor deposition are expected to have practical uses in electro-optics devices. The exceptionally low electron work function makes it a promising material for uses in field emission devices. This work demonstrated that hydrogen gas annealed and boron-doped diamond-like films deposited on gold silicide surfaces increase the field emission efficiency greatly. (C) 2000 Published by Elsevier Science B.V. All rights reserved.

引用

页码：230 / 237

页数：8

共 21 条

[1]

ANGUS JC, 1993, DIAMOND DIAMOND FILM, P126

[2] OBSERVATION OF SPECTRAL AND NORMAL EMISSIVITY AS A METHOD OF SURFACE CONTROL DURING THE GROWTH OF DIAMOND FILMS DEPOSITED BY A MICROWAVE PLASMA-ASSISTED CVD TECHNIQUE [J].

BARRAT, S ;

PIGEAT, P ;

DIEGUEZ, I ;

BAUERGROSSE, E ;

WEBER, B .

THIN SOLID FILMS, 1995, 263 (02) :127-133

[3] MODELING STUDIES OF AMORPHOUS-CARBON [J].

BEEMAN, D ;

SILVERMAN, J ;

LYNDS, R ;

ANDERSON, MR .

PHYSICAL REVIEW B, 1984, 30 (02) :870-875

[4] Photoluminescence and Raman studies of hydrogenated amorphous carbon films deposited by the rf plasma-enhanced CVD method [J].

Chen, CL ;

Lue, JT .

JOURNAL OF NON-CRYSTALLINE SOLIDS, 1996, 194 (1-2) :93-102

[5] USE OF RAMAN-SCATTERING TO INVESTIGATE DISORDER AND CRYSTALLITE FORMATION IN AS-DEPOSITED AND ANNEALED CARBON-FILMS [J].

DILLON, RO ;

WOOLLAM, JA ;

KATKANANT, V .

PHYSICAL REVIEW B, 1984, 29 (06) :3482-3489

[6] MWPACVD DIAMOND HOMOEPITAXIAL GROWTH - ROLE OF THE PLASMA AND THE SUBSTRATE PARAMETERS [J].

FINDELINGDUFOUR, C ;

VIGNES, A ;

GICQUEL, A .

[7]

GOMER R, 1961, FIELD EMISSION FIELD, P8

[8] QUANTUM PHOTOYIELD OF DIAMOND(111) - STABLE NEGATIVE-AFFINITY EMITTER [J].

HIMPSEL, FJ ;

KNAPP, JA ;

VANVECHTEN, JA ;

EASTMAN, DE .

PHYSICAL REVIEW B, 1979, 20 (02) :624-627

[9] SOME PROPERTIES OF CARBON-FILMS DEPOSITED BY LASER-ABLATION [J].

JELINEK, M ;

OLSAN, V ;

SOUKUP, L ;

CHARALABIDIS, D ;

HONTZOPOULOS, E ;

GEORGIOU, E .

[10] Comparision of field electron emission from DLC films produced by four different deposition techniques [J].

Karabutov, AV ;

Konov, VI ;

Ralchenko, VG ;

Obraztsova, ED ;

Frolov, VD ;

Uglov, SA ;

Scheibe, HJ ;

Strelnitskij, VE ;

Polyakov, VI .

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