Design and simulation of an electrostatic micropump for drug-delivery applications

被引：112

作者：

Bourouina, T

Bosseboeuf, A

Grandchamp, JP

机构：

[1] Institut d'Electronique Fondamentale, CNRS URA 22, Bâtiment 220

来源：

JOURNAL OF MICROMECHANICS AND MICROENGINEERING | 1997年 / 7卷 / 03期

关键词：

D O I：

10.1088/0960-1317/7/3/028

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

The design of a micropump employing only one valve is presented. This device was simulated by means of a model based on electrical analogies and equivalent networks. With a total size of 5 mm x 5 mm, and a working voltage of 10 V, the device sizing gives flow rates in the 10-100 nl min(-1) range, which are very suitable for drug-delivery applications.

引用

页码：186 / 188

页数：3

共 7 条

[1] A NEW CONDENSER MICROPHONE WITH A P+ SILICON MEMBRANE [J].