Modeling the pull-in parameters of electrostatic actuators with a novel lumped two degrees of freedom pull-in model

This paper reports a new approach for the direct calculations of the pull-in parameters of electrostatic actuators using a lumped two degrees of freedom (L2DOF) pull-in model. This model benefits from higher accuracy than the lumped single degree of freedom (L1DOF) models. Moreover, it requires much shorter calculation time compared to either finite-differences simulations or the coupled-domain finite-elements (FEM)Iboundary-elements (BEM) simulations. Therefore, this model provides a fast and accurate tool for design optimization of micromachined devices with two-coupled DOF that employ the pull-in phenomenon. In order to confirm the model results, several case studies are compared with either finite-differences simulations or coupled-domains FEM/BEM simulations provided by MEMCAD4.8(TM), showing an excellent agreement. (C) 2002 Elsevier Science B.V. All rights reserved.