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Electrostatically deflectable polysilicon micromirrors - dynamic behaviour and comparison with the results from FEM modelling with ANSYS

被引：54
作者：
Fischer, M
Giousouf, M [1 ]
Schaepperle, J
Eichner, D
Weinmann, M
von Munch, W
Assmus, F
机构：
[1] Univ Stuttgart, Inst Zeitmesstechnik Fein & Mikrotechnik, D-70174 Stuttgart, Germany
[2] Univ Stuttgart, Inst Halbleitertech, D-70174 Stuttgart, Germany
来源：
SENSORS AND ACTUATORS A-PHYSICAL | 1998年 / 67卷 / 1-3期
关键词：
torsional micromirrors; electrostatically deflectable; pull-in voltage; dynamic behaviour; FEM modelling; ANSYS; squeeze-film theory;
D O I：
10.1016/S0924-4247(97)01770-6
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
This paper describes the behaviour of electrostatically deflectable polysilicon torsional micromirrors. The electrostatic behaviour is computed by coupling of mechanical and electrostatic calculations using the FEM program ANSYS. Dynamic deflection measurements on a realized micromirror confirm the results of the simulation. In addition, the dynamic damping behaviour of a polysilicon torsional micromirror is investigated. The pressure dependence of the operation of micromirrors is measured and a comparison with the theory of gas damping is presented. (C) 1998 Elsevier Science S.A. All rights reserved.
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收藏
页码：89 / 95
页数：7
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