Towards automatic nanomanipulation: Drift compensation in scanning probe microscopes

被引:30
作者
Mokaberi, B [1 ]
Requicha, AAG [1 ]
机构
[1] Univ So Calif, Lab Mol Robot, Los Angeles, CA USA
来源
2004 IEEE INTERNATIONAL CONFERENCE ON ROBOTICS AND AUTOMATION, VOLS 1- 5, PROCEEDINGS | 2004年
关键词
nanomanipulation; nanoassembly; Atomic Force Microscopes; Scanning Probe Microscopes; spatial uncertainty; Kalman filtering; nanorobotics;
D O I
10.1109/ROBOT.2004.1307185
中图分类号
TP [自动化技术、计算机技术];
学科分类号
0812 ;
摘要
Manipulation of nanoparticles with Atomic Force Microscopes (AFMs) has been under development for a decade, and is now well established as a technique for prototyping nanodevices and for other applications. The manipulation process tends to be labor-intensive because a user is needed in the loop to compensate for the numerous uncertainties associated with AFM operation. This paper addresses thermal drift, which is the major cause of errors for AFMs operated in ambient conditions. It is shown that drift can be estimated efficiently by using Kalman filtering techniques. Preliminary results indicate that drift compensation enables manipulation of groups of particles under program control, without human intervention, in ambient air and at room temperature. This is a first step towards fully automatic nanomanipulation, which would permit assembling, from the bottom up, nanostructures much more complex than those being built today with AFMs.
引用
收藏
页码:416 / 421
页数:6
相关论文
共 11 条
[1]  
Bar-Shalom Y., 2004, ESTIMATION APPL TRAC
[2]  
HARALICK R, 1993, COMPUTER ROBOT VISON, V2
[3]   Quantitative method of image analysis when drift is present in a scanning probe microscope [J].
Huerth, SH ;
Hallen, HD .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 2003, 21 (02) :714-718
[4]   Servomechanism for locking scanning tunneling microscope tip over surface nanostructures [J].
Ito, KJ ;
Uehara, Y ;
Ushioda, S ;
Ito, K .
REVIEW OF SCIENTIFIC INSTRUMENTS, 2000, 71 (02) :420-423
[5]  
Oppenheim A. V., 1989, DISCRETE TIME SIGNAL
[6]   Nanorobots, NEMS, and nanoassembly [J].
Requicha, AAG .
PROCEEDINGS OF THE IEEE, 2003, 91 (11) :1922-1933
[7]  
REQUICHA AAG, 1999, HDB IND ROBOTICS, P199
[9]   DRIFT ELIMINATION IN THE CALIBRATION OF SCANNING PROBE MICROSCOPES [J].
STAUB, R ;
ALLIATA, D ;
NICOLINI, C .
REVIEW OF SCIENTIFIC INSTRUMENTS, 1995, 66 (03) :2513-2516
[10]   Removing drift from scanning probe microscope images of periodic samples [J].
Woodward, JT ;
Schwartz, DK .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1998, 16 (01) :51-53