Gas sensor based on ordered mesoporous In2O3

被引：56

作者：

Wagner, T. ^{[1
,2
]}

Sauerwald, T. ^{[1
]}

Kohl, C. -D. ^{[1
]}

Waitz, T. ^{[2
]}

Weidmann, C. ^{[2
]}

Tiemann, M. ^{[2
]}

机构：

[1] Univ Giessen, Inst Appl Phys, D-35392 Giessen, Germany

[2] Univ Giessen, Inst Inorgan & Analyt Chem, D-35392 Giessen, Germany

来源：

THIN SOLID FILMS | 2009年 / 517卷 / 22期

关键词：

Mesoporous; In2O3; Gas sensor; Structure replication; SENSING PROPERTIES; INDIUM OXIDE; METAL-OXIDES; STRUCTURE REPLICATION; MAGNESIUM-OXIDE; SPRAY-PYROLYSIS; CMK-3; CARBON; THIN-FILM; SILICA; STRATEGIES;

D O I：

10.1016/j.tsf.2009.04.013

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

We present the preparation of a semiconductor gas sensor based on ordered mesoporous In2O3. The In2O3 was synthesized by structure replication procedure from cubic KIT-6 silica. A detailed analysis of the morphology of the mesoporous powders as well as of the prepared sensing layer will be shown. Unique properties arise from the synthesis method of structure replication such as well defined porosity in the mesoporous regime and nanocrystallites with high thermal stability up to 450 degrees C. These properties are useful for the application in semiconducting gas sensors. Test measurements show sensitivity to methane gas in concentrations relevant for explosion prevention. (C) 2009 Elsevier B.V. All fights reserved.

引用

收藏

页码：6170 / 6175

页数：6

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