Surface roughness and contact angle of bias sputtered CoCrTa film

被引：1

作者：

Chandrasekhar, R ^{[1
]}

Mapps, DJ ^{[1
]}

Blunt, L ^{[1
]}

机构：

[1] UNIV BIRMINGHAM, SCH MFG & MECH ENGN, BIRMINGHAM B15 2TT, W MIDLANDS, ENGLAND

来源：

IEEE TRANSACTIONS ON MAGNETICS | 1996年 / 32卷 / 05期

关键词：

D O I：

10.1109/20.538727

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

Surface roughness of bias sputtered CoCrTa films on glass substrates were studied using an Atomic Force Microscope (AFM) and an interferometer (non contact) optical technique (IOT). Contact angles of the coated disks were measured using a goniometer microscope, Wear tests were performed on the bias sputtered films. The results of these investigations are presented.

引用

页码：3681 / 3683

页数：3

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