A novel ToF-SIMS operation mode for sub 100 nm lateral resolution: Application and performance

被引：77

作者：

Kubicek, Markus ^{[1
]}

Holzlechner, Gerald ^{[1
]}

Opitz, Alexander K. ^{[1
]}

Larisegger, Silvia ^{[1
]}

Hutter, Herbert ^{[1
]}

Fleig, Juergen ^{[1
]}

机构：

[1] Vienna Univ Technol, Inst Chem Technol & Analyt, A-1060 Vienna, Austria

来源：

APPLIED SURFACE SCIENCE | 2014年 / 289卷

基金：

奥地利科学基金会;

关键词：

ToF-SIMS; Oxygen isotope analysis; Lateral resolution; ION MASS-SPECTROMETRY; YTTRIA-STABILIZED ZIRCONIA; OXYGEN REDUCTION SITES; TRACER INCORPORATION; SURFACE EXCHANGE; TRANSPORT; INTERFACE; DIFFUSION; OXIDES; VISUALIZATION;

D O I：

10.1016/j.apsusc.2013.10.177

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

A novel operation mode for time of flight-secondary ion mass spectrometry (ToF-SIMS) is described for a TOF.SIMS 5 instrument with a Bi-ion gun. It features sub 100 nm lateral resolution, adjustable primary ion currents and the possibility to measure with high lateral resolution as well as high mass resolution. The adjustment and performance of the novel operation mode are described and compared to established ToF-SIMS operation modes. Several examples of application featuring novel scientific results show the capabilities of the operation mode in terms of lateral resolution, accuracy of isotope analysis of oxygen, and combination of high lateral and mass resolution. The relationship between high lateral resolution and operation of SIMS in static mode is discussed. (C) 2013 The Authors. Published by Elsevier B.V. All rights reserved.

引用

页码：407 / 416

页数：10

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