Measurement of hardness and elastic modulus by instrumented indentation: Advances in understanding and refinements to methodology

被引:6470
作者
Oliver, WC [1 ]
Pharr, GM
机构
[1] MTS Syst Corp, Oak Ridge, TN 37830 USA
[2] Univ Tennessee, Knoxville, TN 37996 USA
[3] Oak Ridge Natl Lab, Dept Mat Sci & Engn, Knoxville, TN 37996 USA
关键词
D O I
10.1557/jmr.2004.19.1.3
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
The method we introduced in 1992 for measuring hardness and elastic modulus by instrumented indentation techniques has widely been adopted and used in the characterization of small-scale mechanical behavior. Since its original development, the method has undergone numerous refinements and changes brought about by improvements to testing equipment and techniques as well as from advances in our understanding of the mechanics of elastic-plastic contact. Here, we review our current understanding of the mechanics governing elastic-plastic indentation as they pertain to load and depth-sensing indentation testing of monolithic materials and provide an update of how we now implement the method to make the most accurate mechanical property measurements. The limitations of the method are also discussed.
引用
收藏
页码:3 / 20
页数:18
相关论文
共 66 条
[31]  
Love A.E.H., 1939, Q. J. Math., V10, P161, DOI [10.1093/qmath/os-10.1.161, DOI 10.1093/QMATH/OS-10.1.161]
[32]  
Love AEH. IX, 1929, PHILOS T R SOC LOND, V228, P377, DOI [DOI 10.1098/RSTA.1929.0009, 10.1098/RSTA.1929.0009]
[33]   Mechanical characterization of sub-micron polytetrafluoroethylene (PTFE) thin films [J].
Lucas, BN ;
Rosenmayer, CT ;
Oliver, WC .
THIN-FILMS - STRESSES AND MECHANICAL PROPERTIES VII, 1998, 505 :97-102
[34]   Indentation power-law creep of high-purity indium [J].
Lucas, BN ;
Oliver, WC .
METALLURGICAL AND MATERIALS TRANSACTIONS A-PHYSICAL METALLURGY AND MATERIALS SCIENCE, 1999, 30 (03) :601-610
[35]  
Lucas BN, 1997, MATER RES SOC SYMP P, V436, P233
[36]   The dynamics of frequency-specific, depth-sensing indentation testing [J].
Lucas, BN ;
Oliver, WC ;
Swindeman, JE .
FUNDAMENTALS OF NANOINDENTATION AND NANOTRIBOLOGY, 1998, 522 :3-14
[37]   Determination of indenter tip geometry and indentation contact area for depth-sensing indentation experiments [J].
McElhaney, KW ;
Vlassak, JJ ;
Nix, WD .
JOURNAL OF MATERIALS RESEARCH, 1998, 13 (05) :1300-1306
[38]   Determination of elastic modulus of thin layers using nanoindentation [J].
Mencik, J ;
Munz, D ;
Quandt, E ;
Weppelmann, ER ;
Swain, MV .
JOURNAL OF MATERIALS RESEARCH, 1997, 12 (09) :2475-2484
[39]   Spherical indentation of elastic-plastic solids [J].
Mesarovic, SD ;
Fleck, NA .
PROCEEDINGS OF THE ROYAL SOCIETY A-MATHEMATICAL PHYSICAL AND ENGINEERING SCIENCES, 1999, 455 (1987) :2707-2728
[40]   Development and application of a combined atomic force microscopy-nanoindentation system with a silicon tip and a diamond indenter [J].
Miyahara, K ;
Nagashima, N ;
Matsuoka, S .
PHILOSOPHICAL MAGAZINE A-PHYSICS OF CONDENSED MATTER STRUCTURE DEFECTS AND MECHANICAL PROPERTIES, 2002, 82 (10) :2149-2160