Tailoring of the unit cell structure of autocloned photonic crystals

被引:10
作者
Kawashima, T [1 ]
Sato, T
Ohtera, Y
Kawakami, S
机构
[1] Tohoku Univ, NICHe, Aoba Ku, Sendai, Miyagi 9808579, Japan
[2] Japan Sci & Technol Corp, Sendai, Miyagi 9808579, Japan
关键词
fabrication; photonic crystal; reactive ion etching;
D O I
10.1109/JQE.2002.1017604
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
This paper discusses how to enhance the ability to tailor material structures within a unit cell of photonic crystals fabricated by the autocloning method which is based on stacking corrugated multilayers of constant thickness by a bias-sputtering process. We, developed a new process by introducing reactive ion etching into autocloning, and thus created a novel structure having multilayers whose thicknesses are modulated, and the new structure has bandgaps in the directions parallel to the substrate. The new process allows photonic bands of autocloned photonic crystals to be designed with greater controlability, which should facilitate the application of autocloning, such as for in-plane optical circuits.
引用
收藏
页码:899 / 903
页数:5
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