Mechanical and tribological properties of Ar incorporated diamond-like carbon films

被引：40

作者：

Zhang, W ^{[1
]}

Tanaka, A

Wazumi, K

Koga, Y

机构：

[1] Japan Fine Ceram Ctr, Tsukuba, Ibaraki 3058565, Japan

[2] Natl Inst Adv Ind Sci & Technol, Res Ctr Adv Carbon Mat, Tsukuba, Ibaraki 3058565, Japan

来源：

THIN SOLID FILMS | 2002年 / 416卷 / 1-2期

关键词：

Ar incorporated diamond-like carbon film mechanical property; friction; wear;

D O I：

10.1016/S0040-6090(02)00611-9

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

Ar incorporated diamond-like carbon (Ar-DLC) films were prepared on Si wafer by a plasma CVD deposition system using C6H6 and Ar gas. The effects of the Ar on structure, mechanical and tribological properties of the Ar-DLC films were investigated. As the Ar gas flow increased, the deposition rate and sp(3) C fractions of the Ar-DLC films decreased; the hardness and internal compressive stress of the Ar-DLC films decreased. The critical load L-c of the Ar-DLC films was approximately two times that of Ar-free DLC film. In addition, extremely low friction coefficient of 0.04 and wear rate of 10(-10) mm(3)/Nm could be obtained for the Ar-DLC films slide in N-2 environment. The influence of the Ar incorporation on the mechanical and tribological properties of the Ar-DLC films was discussed by combining the structural analyses. (C) 2002 Elsevier Science B.V. All rights reserved.

引用

页码：145 / 152

页数：8

共 21 条

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