Fabrication of planar gratings by direct ablation using an ultrashort pulse laser in a common optical path configuration

被引:13
作者
Venkatakrishnan, K [1 ]
Sivakumar, NR [1 ]
Tan, B [1 ]
机构
[1] Nanyang Technol Univ, Prec Engn & Nanotechnol Ctr, Sch Mfg & Prod Engn, Singapore 639798, Singapore
来源
APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING | 2003年 / 76卷 / 02期
关键词
D O I
10.1007/s003390201418
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
Planar gratings have wide applications and to date, many methods for the fabrication of gratings have been reported. Ultrashort pulse lasers have been used for the machining of gratings primarily because they allow direct ablation and the manufacturing of sub-wavelength structures. In this paper, we present a novel direct ablation technique for the fabrication of planar gratings which makes use of the interference of ultrashort pulses in a common optical path configuration. This technique of grating fabrication not only simplifies the optical setup, but also immunizes the system to extraneous and inherent vibrations, thus enabling the manufacturing of planar gratings of good edge acuity. We have successfully fabricated planar gratings on a copper substrate.
引用
收藏
页码:143 / 146
页数:4
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