ABLATION OF POLYMER-FILMS BY A FEMTOSECOND HIGH-PEAK-POWER TI SAPPHIRE LASER AT 798-NM

被引：151

作者：

KUMAGAI, H ^{[1
]}

MIDORIKAWA, K ^{[1
]}

TOYODA, K ^{[1
]}

NAKAMURA, S ^{[1
]}

OKAMOTO, T ^{[1
]}

OBARA, M ^{[1
]}

机构：

[1] KEIO UNIV,FAC SCI & TECHNOL,KOHOKU KU,YOKOHAMA,KANAGAWA 223,JAPAN

来源：

APPLIED PHYSICS LETTERS | 1994年 / 65卷 / 14期

关键词：

D O I：

10.1063/1.112863

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

Femtosecond infrared pulses from an ultrashort high-peak-power Ti:sapphire laser were successfully utilized for ablation of polymer films such as polytetrafluoroethylene, tetrafluoroethylene-hexafluoropropylene copolymer, and polyimide. Good agreement between experimental data and calculations from a model suggested that simultaneous absorption of three photons for polyimide and five photons for tetrafluoroethylene-hexafluoropropylene copolymer predominated over the other absorptive channels and that such a multiphoton absorption was induced efficiently. (C) 1994 American Institute of Physics.

引用

页码：1850 / 1852

页数：3

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