PULSED ULTRAVIOLET-LASER ABLATION

被引：131

作者：

PETTIT, GH

SAUERBREY, R

机构：

[1] RICE UNIV,RICE QUANTUM INST,HOUSTON,TX 77251

[2] US FDA,CTR DEVICES & RADIOL HLTH,ROCKVILLE,MD 20857

来源：

APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING | 1993年 / 56卷 / 01期

关键词：

D O I：

10.1007/BF00351903

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

The radiation transport involved in pulsed ultraviolet laser ablation of organic materials has been studied both theoretically and experimentally. A mathematical description of the absorption process that includes nonlinear effects such as chromophore saturation and multiphoton absorption is presented. This theoretical model accurately describes the observed polymer etch depth versus incident laser fluence relationship for various target materials, laser wavelengths, and pulse durations varying from nanoseconds to subpicoseconds. The theoretical analysis can also be used to explain observed nonlinearities in the transmission characteristics of polyimide subjected to intense KrF excimer laser irradiation.

引用

页码：51 / 63

页数：13

共 37 条

[1] DIRECT ETCHING OF POLYMERIC MATERIALS USING A XECL LASER [J].