Fluctuation microscopy in the STEM

被引：125

作者：

Voyles, PM ^{[1
]}

Muller, DA ^{[1
]}

机构：

[1] Bell Labs, Lucent Technol, Murray Hill, NJ 07974 USA

来源：

ULTRAMICROSCOPY | 2002年 / 93卷 / 02期

关键词：

D O I：

10.1016/S0304-3991(02)00155-9

中图分类号：

TH742 [显微镜];

学科分类号：

摘要：

Fluctuation electron microscopy is a technique for studying medium-range order in disordered materials. We present an implementation of fluctuation microscopy using nanodiffraction in a scanning transmission electron microscope (STEM) at a spatial resolution varying from 0,8 to 5.0 nm. Compared to conventional TEM (CTEM), the STEM-based technique offers a denser scattering vector sampling at a reduced sample dose and easier access to variable resolution information. We have reproduced results on amorphous silicon previously obtained by CTEM-based fluctuation microscopy, and report initial variable-resolution measurements on amorphous germanium. (C) 2002 Elsevier Science B.V. All rights reserved.

引用

页码：147 / 159

页数：13

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