Optimal design of piezoelectric cantilever for a micro power generator with microbubble

被引：11

作者：

Kang, JY ^{[1
]}

Kim, HJ ^{[1
]}

Kim, JS ^{[1
]}

Kim, TS ^{[1
]}

机构：

[1] Korea Inst Sci & Technol, Microsyst Ctr, Seoul, South Korea

来源：

2ND ANNUAL INTERNATIONAL IEEE-EMBS SPECIAL TOPIC CONFERENCE ON MICROTECHNOLOGIES IN MEDICINE & BIOLOGY, PROCEEDINGS | 2002年

关键词：

power generator; microbubble; piezoelectric cantilever; energy density; optimization;

D O I：

10.1109/MMB.2002.1002361

中图分类号：

Q5 [生物化学];

学科分类号：

071010 ; 081704 ;

摘要：

We propose a design method of piezoelectric cantilever to acquire maximum power from a micro power generation system, whose cantilever is pushed upward by microbubble and the deflected piezoelectric layer generates electric charges. We optimize geometric parameters for the maximum energy density by theoretical analysis. The optimal shapes are long and slender one for thick film cantilever and short and wide one as thin film one. We fabricated thick film cantilever and setup the experimental system.

引用

页码：424 / 427

页数：4