Working equations for piezoelectric actuators and sensors

被引:191
作者
Weinberg, MS [1 ]
机构
[1] Charles Stark Draper Lab Inc, Cambridge, MA 02139 USA
关键词
actuator; AlN; bimorph; model; monomorph; multimorph; piezoelectric; PZT; quartz; sensor; ZnO;
D O I
10.1109/84.809069
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
A new solution to the force, displacements, and charges developed in piezoelectric beams is derived. Differing from previous solutions [1]-[3], this development determines the neutral axis where the bending strains are zero and results in a closed form solution (without matrix inversion). With the closed form, simplifications become evident which increase understanding and facilitate calculations. These equations are than expanded to account for axial, built-in strains in the beam. A design example where axial forces exerted by the piezoelectric layer are important is presented. [354].
引用
收藏
页码:529 / 533
页数:5
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