Two-dimensional gas-dynamic model of laser ablation in an ambient gas

被引:35
作者
Gusarov, AV
Gnedovets, AG
Smurov, I
机构
[1] Ecole Natl Ingenieurs St Etienne, F-42023 St Etienne 2, France
[2] Russian Acad Sci, Baikov Inst Met, Moscow 117911, Russia
关键词
laser ablation; ambient gas; gas dynamics; energy distribution; angular distribution;
D O I
10.1016/S0169-4332(99)00389-X
中图分类号
O64 [物理化学(理论化学)、化学物理学];
学科分类号
070304 ; 081704 ;
摘要
A two-step gas-dynamic model of laser ablation in an ambient gas atmosphere is proposed. The initial 1D stage is related to ablation plume formation and describes heating, melting and evaporation of the target, the target-vapour interaction in the boundary layer, and vapour dynamics. The final 2D stage is responsible for the formation of energy and angular distributions of the ablated material. These distributions are calculated assuming local thermodynamic equilibrium. Interaction between the vapour and ambient gas is taken into account by two-component gas-dynamic equations. Numerical analysis of laser ablation in ambient gas atmosphere revealed that both kinetic energy of ablated atoms and width of their angular distribution decrease with ambient pressure. Dynamics of ablated material expansion and its energy distribution are compared with the experiment. (C) 2000 Elsevier Science B.V. All rights reserved.
引用
收藏
页码:66 / 72
页数:7
相关论文
共 14 条
[1]  
Anderson DA, 1984, COMPUTATIONAL FLUID
[2]  
[Anonymous], 1994, NUMERICAL SIMULATION
[3]   GAS-DYNAMICS RESULTING FROM LASER VAPORIZATION OF METALS IN ONE-DIMENSION .1. [J].
BELLANTONE, R ;
HAHN, Y .
JOURNAL OF APPLIED PHYSICS, 1994, 76 (03) :1436-1446
[4]   NEAR-THRESHOLD LASER SPUTTERING OF GOLD [J].
BENNETT, TD ;
GRIGOROPOULOS, CP ;
KRAJNOVICH, DJ .
JOURNAL OF APPLIED PHYSICS, 1995, 77 (02) :849-864
[5]  
BRESLAVSKY PV, 1992, MATH MODELING PROCES
[6]  
Carslaw HS., 1948, CONDUCTION HEAT SOLI
[7]   Mechanisms affecting kinetic energies of laser-ablated materials [J].
Chen, KR ;
Leboeuf, JN ;
Wood, RF ;
Geohegan, DB ;
Donato, JM ;
Liu, CL ;
Puretzky, AA .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, 1996, 14 (03) :1111-1114
[8]   PULSED-LASER DEPOSITION OF MOS(X) FILMS IN A BUFFER GAS ATMOSPHERE [J].
FOMINSKY, VY ;
MARKEEV, AM ;
NEVOLIN, VN ;
PROKOPENKO, VB ;
VRUBLEVSKI, AR .
THIN SOLID FILMS, 1994, 248 (02) :240-246
[9]   Expansion dynamics of the plasma produced by laser ablation of BaTiO3 in a gas environment [J].
Gonzalo, J ;
Afonso, CN ;
Madariaga, I .
JOURNAL OF APPLIED PHYSICS, 1997, 81 (02) :951-955
[10]   Li deficiencies in LiNbO3 films prepared by pulsed laser deposition in a buffer gas [J].
Gonzalo, J ;
Afonso, CN ;
Ballesteros, JM ;
Grosman, A ;
Ortega, C .
JOURNAL OF APPLIED PHYSICS, 1997, 82 (06) :3129-3133