Vacancy-hydrogen complexes in group-IV semiconductors

被引:22
作者
Budde, M
Nielsen, BB
Keay, JC
Feldman, LC
机构
[1] Vanderbilt Univ, Dept Phys & Astron, Nashville, TN 37235 USA
[2] Univ Aarhus, Inst Phys & Astron, Aarhus, Denmark
关键词
H; Ge; vacancy; local vibrational modes;
D O I
10.1016/S0921-4526(99)00448-2
中图分类号
O469 [凝聚态物理学];
学科分类号
070205 ;
摘要
Hydrogen-related defects in proton-implanted crystalline Ge and 6H-SiC are studied with IR spectroscopy. Absorption lines at 1979.5, 1992.6, 2014.9, 2024.8 and 2061.5 cm(-1) in Ge:H are identified as Ge-H stretch modes of three distinct vacancy-hydrogen complexes. The properties of H-related defects are very similar in Ge:H and Si:H. In contrast, no LVMs are observed in 6H-SiC: H, indicating that H behaves differently in this material. (C) 1999 Elsevier Science B.V. All rights reserved.
引用
收藏
页码:208 / 211
页数:4
相关论文
共 13 条
[1]  
BECHNIELSEN B, 1989, PHYS REV B, V39, P3330
[2]   Identification of the hydrogen-saturated self-interstitials in silicon and germanium [J].
Budde, M ;
Nielsen, BB ;
Leary, P ;
Goss, J ;
Jones, R ;
Briddon, PR ;
Oberg, S ;
Breuer, SJ .
PHYSICAL REVIEW B, 1998, 57 (08) :4397-4412
[3]   Local modes of the H-2 dimer in germanium [J].
Budde, M ;
Nielsen, BB ;
Jones, R ;
Goss, J ;
Oberg, S .
PHYSICAL REVIEW B, 1996, 54 (08) :5485-5494
[4]   MICROSCOPIC IDENTIFICATION AND ELECTRONIC-STRUCTURE OF A DI-HYDROGEN VACANCY COMPLEX IN SILICON BY OPTICAL-DETECTION OF MAGNETIC-RESONANCE [J].
CHEN, WM ;
AWADELKARIM, OO ;
MONEMAR, B ;
LINDSTROM, JL ;
OEHRLEIN, GS .
PHYSICAL REVIEW LETTERS, 1990, 64 (25) :3042-3045
[5]   HYDROGEN-RELATED DEFECTS IN CRYSTALLINE SEMICONDUCTORS - A THEORISTS PERSPECTIVE [J].
ESTREICHER, SK .
MATERIALS SCIENCE & ENGINEERING R-REPORTS, 1995, 14 (7-8) :319-412
[6]   Identification of the silicon vacancy containing a single hydrogen atom by EPR [J].
Nielsen, BB ;
Johannesen, P ;
Stallinga, P ;
Nielsen, KB ;
Byberg, JR .
PHYSICAL REVIEW LETTERS, 1997, 79 (08) :1507-1510
[7]   Si-H stretch modes of hydrogen-vacancy defects in silicon [J].
Nielsen, BB ;
Hoffmann, L ;
Budde, M .
MATERIALS SCIENCE AND ENGINEERING B-SOLID STATE MATERIALS FOR ADVANCED TECHNOLOGY, 1996, 36 (1-3) :259-263
[8]  
NIELSEN BB, IN PRESS
[9]   THE NATURE OF 2 INTENSE SI-H IR STRETCHING BANDS IN FZ-SI-H [J].
SHI, TS ;
XIE, LM ;
BAI, GR ;
QI, MW .
PHYSICA STATUS SOLIDI B-BASIC RESEARCH, 1985, 131 (02) :511-517
[10]   Electron paramagnetic resonance study of hydrogen-vacancy defects in crystalline silicon [J].
Stallinga, P ;
Johannesen, P ;
Herstrom, S ;
Nielsen, KB ;
Nielsen, BB ;
Byberg, JR .
PHYSICAL REVIEW B, 1998, 58 (07) :3842-3852