Investigations of diamond-like carbon films produced directly from an ion beam of industrial ion source with a cold cathode

被引：4

作者：

Enisherlova, KL ^{[1
]}

Kontsevoi, YA ^{[1
]}

Chervyakova, EN ^{[1
]}

Mitrofanov, EA ^{[1
]}

Maishev, YP ^{[1
]}

机构：

[1] STATE SCI RES INST VACUUM TECH,MOSCOW 113105,RUSSIA

来源：

MATERIALS SCIENCE AND ENGINEERING B-SOLID STATE MATERIALS FOR ADVANCED TECHNOLOGY | 1997年 / 46卷 / 1-3期

关键词：

diamond-like carbon films; ion beam; cold cathode;

D O I：

10.1016/S0921-5107(96)01949-6

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

Experiments have been carried out on an industrial multifunctional ion-beam treatment system 'Kashtan' equipped as an ion source with a cold cathode 'Radical-M'. DLC films have been produced from ion beams of CH4 and C6H12. The composition, structure, mechanical, optical and electrophysical properties of these films have been investigated. The technology of DLC films of 2.0 mu m thickness deposited on GaAs wafers has been developed. (C) 1997 Elsevier Science S.A.

引用

页码：137 / 140

页数：4

共 5 条

[1] LOW-PRESSURE, METASTABLE GROWTH OF DIAMOND AND DIAMONDLIKE PHASES [J].

ANGUS, JC ;

HAYMAN, CC .

SCIENCE, 1988, 241 (4868) :913-921

[2]

DESPHANDEY CV, 1989, J VAC SCI TECHNOL A, V7, P2294

[3]

HAM M, 1990, J VAC SCI TECHNOL A, V8, P143

[4] TECHNOLOGY AND APPLICATIONS OF BROAD-BEAM ION SOURCES USED IN SPUTTERING .1. ION-SOURCE TECHNOLOGY [J].

KAUFMAN, HR ;

CUOMO, JJ ;

HARPER, JME .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1982, 21 (03) :725-736

[5]

Maishev YuP, 1992, VACUUM TECH TECHNOL, V2, P53

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