Optical coatings by ion-beam sputtering deposition for long-wave infrared quantum cascade lasers

被引:17
作者
Nguyen, J. [1 ]
Yu, J. S. [1 ]
Evans, A. [1 ]
Slivken, S. [1 ]
Razeghi, M. [1 ]
机构
[1] Northwestern Univ, Dept Elect Engn & Comp Sci, Ctr Quantum Devices, Evanston, IL 60208 USA
关键词
D O I
10.1063/1.2353815
中图分类号
O59 [应用物理学];
学科分类号
摘要
The authors report on the development of high-reflection and multilayer antireflection coatings using ion-beam sputtering deposition for long-wave infrared (lambda similar to 9.4 mu m) quantum cascade lasers. A metallic high-reflection coating structure using Y2O3 and Au is demonstrated to achieve a high reflectance of 96.70%, and the use of a multilayer anti-reflection coating structure using PbTe and ZnO is demonstrated to achieve a very low reflectance of 1.64%. A 170% improvement of peak laser output power and a 169% increase in wall-plug efficiency are reported without any beam steering effects. (c) 2006 American Institute of Physics.
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页数:3
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