Air entrainment in an inductively coupled plasma measured by Raman and Rayleigh scattering

被引:9
作者
deRegt, JM [1 ]
deGroote, FPJ [1 ]
vanderMullen, JAM [1 ]
Schram, DC [1 ]
机构
[1] EINDHOVEN UNIV TECHNOL,DEPT PHYS,NL-5600 MB EINDHOVEN,NETHERLANDS
关键词
air entrainment; diagnostics; inductively coupled plasma; Raman scattering; Rayleigh scattering;
D O I
10.1016/0584-8547(96)01519-4
中图分类号
O433 [光谱学];
学科分类号
0703 ; 070302 ;
摘要
A new technique to study the entrainment of air into the inductively coupled argon plasma is presented. The combination of vibrational Raman scattering and Rayleigh scattering enables measuring absolute particle densities of air and argon. The measurements show the entrainment of air into the plasma. At an axial position of 2 mm above the end of the quartz torch it is found that at 90% of the plasma radius 55% of the particles originate from air and by exponential extrapolation towards 70% of the radius about 1% entrainment of air is predicted to be present. Furthermore, a comparison with a cold argon flow shows that due to the higher viscosity the entrainment in the plasma is lower than in the cold argon flow.
引用
收藏
页码:1527 / 1534
页数:8
相关论文
共 8 条
[1]  
[Anonymous], 1987, INDUCTIVELY COUPLE 2
[2]  
BENOY DA, 1993, THESIS ENDHOVEN NETH
[3]   THOMSON SCATTERING EXPERIMENTS ON A 100-MHZ INDUCTIVELY-COUPLED PLASMA CALIBRATED BY RAMAN-SCATTERING [J].
DEREGT, JM ;
ENGELN, RAH ;
DEGROOTE, FPJ ;
VANDERMULLEN, JAM ;
SCHRAM, DC .
REVIEW OF SCIENTIFIC INSTRUMENTS, 1995, 66 (05) :3228-3233
[4]  
DEREGT JM, 1996, IN PRESS SPECTROCH B
[5]  
Herzberg G., 1965, SPECTRA DIATOMIC MOL
[6]   SIMULTANEOUS MEASUREMENT OF SPATIALLY RESOLVED ELECTRON TEMPERATURES, ELECTRON NUMBER DENSITIES AND GAS TEMPERATURES BY LASER-LIGHT SCATTERING FROM THE ICP [J].
HUANG, M ;
HIEFTJE, GM .
SPECTROCHIMICA ACTA PART B-ATOMIC SPECTROSCOPY, 1989, 44 (08) :739-749
[7]   MODIFIED FOWLER-MILNE METHOD FOR THE SPECTROSCOPIC MEASUREMENT OF TEMPERATURE AND COMPOSITION OF MULTIELEMENT THERMAL PLASMAS [J].
MURPHY, AB .
REVIEW OF SCIENTIFIC INSTRUMENTS, 1994, 65 (11) :3423-3427
[8]   THERMODYNAMIC AND TRANSPORT-PROPERTIES OF AR-H2 AND AR-HE PLASMA GASES USED FOR SPRAYING AT ATMOSPHERIC-PRESSURE .1. PROPERTIES OF THE MIXTURES [J].
PATEYRON, B ;
ELCHINGER, MF ;
DELLUC, G ;
FAUCHAIS, P .
PLASMA CHEMISTRY AND PLASMA PROCESSING, 1992, 12 (04) :421-448