High-Tc superconducting bolometer on chemically-etched 7 μm thick sapphire

被引：15

作者：

Lakew, B

Brasunas, JC

Piqué, A

Fettig, R

Mott, B

Babu, S

Cushman, GM

机构：

[1] NASA, Goddard Space Flight Ctr, Greenbelt, MD 20771 USA

[2] Neocera, Beltsville, MD 20705 USA

[3] Raytheon Co, Lanham, MD 20706 USA

来源：

PHYSICA C | 2000年 / 329卷 / 02期

基金：

美国国家航空航天局;

关键词：

IR detectors; applications of high-T-c superconductors; etched sapphire;

D O I：

10.1016/S0921-4534(99)00544-4

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

A transition-edge IR detector, using a YBa2Cu3O7-x (YBCO) thin film deposited on a chemically etched 7 mu m thick sapphire substrate has been built. To our knowledge, it is the first such high-T-c superconducting (HTS) bolometer on chemically thinned sapphire. The peak optical detectivity obtained is 1.2 X 10(10) cm Hz(1/2)/W near 4 Hz. Results show that it is possible to obtain high detectivity with thin films on etched sapphire with no processing after the deposition of the YBCO film. We discuss the etching process and its potential for micro-machining sapphire and fabricating two-dimensional detector arrays with suspended sapphire membranes. A 30 mu m thick layer of gold black provided IR absorption. Comparison is made with the current state of the art on silicon substrates. (C) 2000 Elsevier Science B.V. All rights reserved.

引用

页码：69 / 74

页数：6

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