Native defects and their interactions in silicon

被引:23
作者
Colombo, L
机构
[1] Univ Milan, INFM, I-20125 Milan, Italy
[2] Univ Milan, Dept Mat Sci, I-20125 Milan, Italy
关键词
silicon; self-interstitial defect; vacancy defect; like-defect cluster; tight-binding molecular dynamics; lattice kinetic Monte Carlo;
D O I
10.1016/S0921-4526(99)00522-0
中图分类号
O469 [凝聚态物理学];
学科分类号
070205 ;
摘要
We discuss the application of various quantum-mechanically based computational models to the investigation of microstructural evolution in crystalline silicon mediated by intrinsic defects. Focus is on the formation of like-defect clusters. (C) 1999 Elsevier Science B.V. All rights reserved.
引用
收藏
页码:458 / 462
页数:5
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