Heat transfer analysis and optimization of two-beam microelectromechanical thermal actuators

This article investigates rectangular two-beam microelectromechanical thermal actuators and provides a method for their optimization. The thermal actuators investigated consisted of two asymmetric parallel arms,one thin and one wide. Under an electric current load, the thin anti heats and expands more than the wide arm, thereby bending the entire structure. Simplified models of the heat transfer mechanisms are used to determine the temperature profile. From the thermal expressions for expansion of the arms, equations are derived to predict the deflection as well as the buckling loads. Measurements of the actuator deflection as a function of voltage are presented. Design guidelines are introduced for optimization of a thermal actuator. (C) 2002 American Vacuum Society.