Spectroscopy as in-situ diagnostics for pulsed laser deposition of superconductive and ferroelectric thin films

被引：7

作者：

Allegrini, M ^{[1
]}

Fuso, F ^{[1
]}

Lorenzi, G ^{[1
]}

Vyacheslavov, LN ^{[1
]}

Arimondo, E ^{[1
]}

机构：

[1] UNIV MESSINA,DIPARTIMENTO FIS MAT GEOFIS & FIS AMBIENTE,I-98166 SANT AGATA,ME,ITALY

来源：

APPLIED SURFACE SCIENCE | 1996年 / 106卷

关键词：

D O I：

10.1016/S0169-4332(96)00367-4

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

We currently use optical spectroscopy as an in-situ diagnostic tool in the pulsed laser ablation and deposition of superconductive and ferroelectric thin films. The emission from the ablated species is collected from both directions normal and parallel to the plume expansion axis. Space and time resolved measurements enable a quantitative evaluation of density and temperature of the plasma produced by the laser-plume interaction. This characterization of the plume in the early stages of its expansion is important to understand the mechanisms responsible for the efficient laser-matter energy coupling typical of the pulsed laser ablation and deposition process.

引用

页码：438 / 446

页数：9

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