Emission characterization of diamond-coated Si field emission arrays

被引：34

作者：

Zhirnov, VV ^{[1
]}

Givargizov, EI ^{[1
]}

Kandidov, AV ^{[1
]}

Seleznev, BV ^{[1
]}

Alimova, AN ^{[1
]}

机构：

[1] MOSCOW MV LOMONOSOV STATE UNIV,INST NUCL PHYS,MOSCOW 119899,RUSSIA

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B | 1997年 / 15卷 / 02期

关键词：

D O I：

10.1116/1.589595

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

Large-area arrays of Si tips (10(5)-10(6) tips in an array) with diamond coating were tested in pulse and de modes. The arrays demonstrated uniform emission, reproducible I-V plots, and low emission threshold. The maximum current achieved with diamond-coated Si arrays was 80 mA in pulse made. Emission characteristics were found to be superior to the uncoated Si tip arrays or diamond-coated flat cathodes. (C) 1997 American Vacuum Society.

引用

页码：446 / 449

页数：4

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