Vacuum arc trigger systems based on ExB discharges

被引:18
作者
Nikolaev, AG
Yushkov, GY
Oks, EM
MacGill, RA
Dickinson, MR
Brown, IG
机构
[1] TOMSK STATE ACAD CONTROL SYST & RADIOELECT,TOMSK 634050,RUSSIA
[2] UNIV CALIF BERKELEY,LAWRENCE BERKELEY LAB,BERKELEY,CA 94720
关键词
D O I
10.1063/1.1147434
中图分类号
TH7 [仪器、仪表];
学科分类号
0804 ; 080401 ; 081102 ;
摘要
Triggering systems for vacuum are plasma sources and ion sources have: been developed that make use of a gaseous trigger discharge in a strong magnetic field. Two kinds of trigger discharge configurations have been explored, a Penning discharge and a magnetron discharge. The approach works reliably for low gas pressure in the vacuum are environment and fbr long periods of operation between required maintenance: pressures in the mid-10(-6) Ton range anti for greater than or similar to 10(6) pulses. (C) 1996 American Institute of Physics.
引用
收藏
页码:3095 / 3098
页数:4
相关论文
共 15 条
[1]   TRANSPORT OF VACUUM-ARC PLASMAS THROUGH MAGNETIC MACROPARTICLE FILTERS [J].
ANDERS, A ;
ANDERS, S ;
BROWN, IG .
PLASMA SOURCES SCIENCE & TECHNOLOGY, 1995, 4 (01) :1-12
[2]   BROAD-BEAM MULTI-AMPERE METAL-ION SOURCE [J].
BROWN, IG ;
GALVIN, JE ;
MACGILL, RA ;
PAOLONI, FJ .
REVIEW OF SCIENTIFIC INSTRUMENTS, 1990, 61 (01) :577-579
[3]   VACUUM-ARC ION SOURCES [J].
BROWN, IG .
REVIEW OF SCIENTIFIC INSTRUMENTS, 1994, 65 (10) :3061-3082
[4]   VACUUM-ARC ION SOURCES FOR PARTICLE ACCELERATORS AND ION-IMPLANTATION [J].
BROWN, IG .
IEEE TRANSACTIONS ON PLASMA SCIENCE, 1993, 21 (05) :537-546
[5]   NOVEL METAL-ION SURFACE MODIFICATION TECHNIQUE [J].
BROWN, IG ;
GODECHOT, X ;
YU, KM .
APPLIED PHYSICS LETTERS, 1991, 58 (13) :1392-1394
[6]   THE 100-KV GAS AND METAL-ION SOURCE FOR HIGH-CURRENT ION-IMPLANTATION [J].
BUGAEV, SP ;
NIKOLAEV, AG ;
OKS, EM ;
SCHANIN, PM ;
YUSHKOV, GY .
REVIEW OF SCIENTIFIC INSTRUMENTS, 1992, 63 (04) :2422-2424
[7]   THE TITAN ION-SOURCE [J].
BUGAEV, SP ;
NIKOLAEV, AG ;
OKS, EM ;
SCHANIN, PM ;
YUSHKOV, GY .
REVIEW OF SCIENTIFIC INSTRUMENTS, 1994, 65 (10) :3119-3125
[8]   METAL VAPOR VACUUM-ARC ION-SOURCE RESEARCH AT ANSTO [J].
EVANS, PJ ;
WATT, GC ;
NOORMAN, JT .
REVIEW OF SCIENTIFIC INSTRUMENTS, 1994, 65 (10) :3082-3087
[9]  
NIKOLAEV AG, 1995, P 22 INT C PHEN ION, V1, P95
[10]   Physics and technique of plasma electron sources [J].
Oks, E. M. .
PLASMA SOURCES SCIENCE & TECHNOLOGY, 1992, 1 (04) :249-255