Piezoreflectance study of an Fe-containing silicon carbon nitride crystalline film

被引：6

作者：

Hsieh, CH

Huang, YS ^{[1
]}

Tiong, KK

Fan, CW

Chen, YF

Chen, LC

Wu, JJ

Chen, KH

机构：

[1] Natl Taiwan Univ Sci & Technol, Dept Elect Engn, Taipei 106, Taiwan

[2] Natl Taiwan Ocean Univ, Dept Elect Engn, Keelung 202, Taiwan

[3] Natl Taiwan Univ, Dept Phys, Taipei 106, Taiwan

[4] Natl Taiwan Univ, Ctr Condensed Matter Sci, Taipei 106, Taiwan

[5] Acad Sinica, Inst Atom & Mol Sci, Taipei 106, Taiwan

来源：

JOURNAL OF APPLIED PHYSICS | 2000年 / 87卷 / 01期

关键词：

D O I：

10.1063/1.371856

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

A detailed piezoreflectance (PzR) study of an Fe-containing silicon carbon nitride crystalline film in the temperature range between 15 and 580 K was performed. From the line shape fit of the PzR spectra, the impurity to band and the direct band-to-band transition energies which are denoted as E-i and E-g(d), respectively, at various temperatures were accurately determined. The parameters that describe the temperature dependence of E-i and E-g(d) are evaluated and discussed. (C) 2000 American Institute of Physics. [S0021-8979(00)07001-8].

引用

页码：280 / 284

页数：5

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