Improvement of InGaN/GaN light emitting diode performance with a nano-roughened p-GaN surface by excimer laser-irradiation

被引:15
作者
Huang, Hung-Wen
Kao, C. C.
Chu, J. T.
Liang, W. D.
Kuo, H. C. [1 ]
Wang, S. C.
Yu, C. C.
机构
[1] Natl Chiao Tung Univ, Dept Photon, Inst Electroopt Engn, Hsinchu 300, Taiwan
[2] TrueLight Corp, Hsinchu 300, Taiwan
[3] Highlink Corp, Hsinchu 300, Taiwan
关键词
gallium nitride (GaN); light emitting diode (LED); excimer laser; NITRIDE-BASED LEDS; ACTIVATION;
D O I
10.1016/j.matchemphys.2005.11.013
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
In this paper, we reported the InGaN/GaN light emitting diode (LED) with a nano-roughened top p-GaN surface which caused by KrF excimer laser-irradiation. Comparing with the conventional LED, the brightness of InGaN/GaN light emitting diode (LED) was raised by a factor of 1.25 at 20 mA after KrF excimer laser-irradiation (250 mJ cm(-2) at 248 nm for 25 ns). Meanwhile, the operation voltage of InGaN/GaN LED was reduced from 3.55 to 3.3 V at 20 mA with 29% reduction in the series resistance. The causes for the brightness increase can be attributed to laser-irradiation induced nano-roughening of p-GaN surface. The reduction in the series resistance can be attributed to the increased contact area of nano-roughened surface and higher hole concentration after laser-irradiation. (c) 2005 Published by Elsevier B.V.
引用
收藏
页码:414 / 417
页数:4
相关论文
共 16 条
[1]   Nitride-based LEDs with textured side walls [J].
Chang, CS ;
Chang, SJ ;
Su, YK ;
Lee, CT ;
Lin, YC ;
Lai, WC ;
Shei, SC ;
Ke, JC ;
Lo, HM .
IEEE PHOTONICS TECHNOLOGY LETTERS, 2004, 16 (03) :750-752
[2]   Nitride-based LEDs with 800 °C grown p-AllnGaN-GaN double-cap layers [J].
Chang, SJ ;
Wu, LW ;
Su, YK ;
Hsu, YP ;
Lai, WC ;
Tsai, JA ;
Sheu, JK ;
Lee, CT .
IEEE PHOTONICS TECHNOLOGY LETTERS, 2004, 16 (06) :1447-1449
[3]  
Eisert D., 2002, INT C NUM SIM SEM OP
[4]   Improved light-output and electrical performance of InGaN-based, light-emitting diode by microroughening of the p-GaN surface [J].
Huh, C ;
Lee, KS ;
Kang, EJ ;
Park, SJ .
JOURNAL OF APPLIED PHYSICS, 2003, 93 (11) :9383-9385
[5]   Effects of KrF excimer laser irradiation on metal contacts to n-type and p-type GaN [J].
Jang, HW ;
Sands, T ;
Lee, JL .
JOURNAL OF APPLIED PHYSICS, 2003, 94 (05) :3529-3535
[6]   Effects of KrF (248 nm) excimer laser irradiation on electrical and optical properties of GaN:Mg [J].
Kim, DJ ;
Kim, HM ;
Han, MG ;
Moon, YT ;
Lee, S ;
Park, SJ .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 2003, 21 (02) :641-644
[7]  
Kim DJ, 2001, PHYS STATUS SOLIDI B, V228, P375, DOI 10.1002/1521-3951(200111)228:2<375::AID-PSSB375>3.0.CO
[8]  
2-A
[9]   High-power truncated-inverted-pyramid (AlxGa1-x)0.5In0.5P/GaP light-emitting diodes exhibiting &gt;50% external quantum efficiency [J].
Krames, MR ;
Ochiai-Holcomb, M ;
Höfler, GE ;
Carter-Coman, C ;
Chen, EI ;
Tan, IH ;
Grillot, P ;
Gardner, NF ;
Chui, HC ;
Huang, JW ;
Stockman, SA ;
Kish, FA ;
Craford, MG ;
Tan, TS ;
Kocot, CP ;
Hueschen, M ;
Posselt, J ;
Loh, B ;
Sasser, G ;
Collins, D .
APPLIED PHYSICS LETTERS, 1999, 75 (16) :2365-2367
[10]   Efficiency improvement in light-emitting diodes based on geometrically deformed chips [J].
Lee, SJ ;
Song, SW .
LIGHT-EMITTING DIODES: RESEARCH, MANUFACTURING, AND APPLICATIONS III, 1999, 3621 :237-248