On the properties and functionality of ultra-thin diamond related protective coatings used in optical systems

被引：17

作者：

Gioti, M ^{[1
]}

Logothetidis, S

Charitidis, C

Panayiotatos, Y

Varsano, I

机构：

[1] Aristotle Univ Thessaloniki, Dept Phys, GR-54006 Thessaloniki, Greece

[2] UNION, OPTIC, Thessaloniki Ind Area, GR-57022 Thessaloniki, Greece

来源：

SENSORS AND ACTUATORS A-PHYSICAL | 2002年 / 99卷 / 1-2期

关键词：

antireflective coatings; protective coatings; carbon-based films; boron nitride films; spectroscopic ellipsometry; nanoindentation studies;

D O I：

10.1016/S0924-4247(01)00887-1

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

In this work we investigate the applicability of sputtered developed films belonging to diamond related materials, like amorphous carbon (a-C), carbon nitride (CNx), and boron nitride (BNx) films, as protective overcoatings of optical systems. Their suitability is defined by the combination of optical transparency (low absorption in the VIS energy region) with the high hardness and wear resistant character of the coating. The optical systems of our interest are electron-beam evaporated TiO2/SiO2 multi-layered coatings grown on polymeric substrates, which exhibit the optimum antireflective (AR) optical behavior but low wear durability and hardness. Within this research frame it was found a considerable enhancement of hardness of the AR optical coatings, which were studied by nanoindentation measurements, when an ultra-thin (similar to100 Angstrom) protective coating either of a-C, CNx or BNx is grown on top of them. In order to define which coating is the most proper one for such applications we extensively studied by spectroscopic ellipsometry the dielectric response and the optical properties of the developed films, as well as the combined reflectivity and optical response of the complete systems (AR/protective coatings). (C) 2002 Elsevier Science B.V. All rights reserved.

引用

页码：35 / 40

页数：6

共 19 条

[1]

Azzam R., 1977, ELLIPSOMETRY POLARIZ

[2] Optical properties and new vibrational modes in carbon films [J].

Gioti, M ;

Papadimitriou, D ;

Logothetidis, S .

[3] Magnetron sputtered carbon nitride: composition and chemical bonding of as-grown and post-annealed films studied with real-time and in situ diagnostic techniques [J].

Gioti, M ;

Logothetidis, S ;

Patsalas, P ;

Laskarakis, A ;

Panayiotatos, Y ;

Kechagias, V .

SURFACE & COATINGS TECHNOLOGY, 2000, 125 (1-3) :289-294

[4] Optical properties and new carbon forms of sputtered amorphous carbon films [J].

Gioti, M ;

Logothetidis, S .

[5] Subwavelength-structured antireflective surfaces on glass [J].

Gombert, A ;

Glaubitt, W ;

Rose, K ;

Dreibholz, J ;

Bläsi, B ;

Heinzel, A ;

Sporn, D ;

Döll, W ;

Wittwer, V .

THIN SOLID FILMS, 1999, 351 (1-2) :73-78

[6] Parameterization of the optical functions of amorphous materials in the interband region [J].

Jellison, GE ;

Modine, FA .

APPLIED PHYSICS LETTERS, 1996, 69 (03) :371-373

[7] Studies with nondestructive techniques of the composition, initial stages of growth and surface topography of thin amorphous carbon films [J].

Logothetidis, S ;

Stergioudis, G ;

Vouroutzis, N .

SURFACE & COATINGS TECHNOLOGY, 1998, 100 (1-3) :486-490

[8] Elastic properties of hydrogen-free amorphous carbon thin films and their relation with carbon-carbon bonding [J].

Logothetidis, S ;

Charitidis, C .

THIN SOLID FILMS, 1999, 353 (1-2) :208-213

[9]

LOGOTHETIDIS S, UNPUB

[10] A simple technology to improve crystalline-silicon solar cell efficiency [J].

Marques, FC ;

Urdanivia, J ;

Chambouleyron, I .

SOLAR ENERGY MATERIALS AND SOLAR CELLS, 1998, 52 (3-4) :285-292

← 1 2 →