Studies with nondestructive techniques of the composition, initial stages of growth and surface topography of thin amorphous carbon films

被引:8
作者
Logothetidis, S [1 ]
Stergioudis, G [1 ]
Vouroutzis, N [1 ]
机构
[1] Aristotle Univ Thessaloniki, Dept Phys, Thessaloniki 54006, Greece
关键词
amorphous carbon; spectroscopic ellipsometry; X-ray reflectometry; atomic force; microscopy; growth;
D O I
10.1016/S0257-8972(97)00676-2
中图分类号
TB3 [工程材料学];
学科分类号
0805 ; 080502 ;
摘要
Amorphous carbon (a-C) films. free of hydrogen, were prepared by magnetron sputtering. The films were deposited either with positive or negative bias voltages (V-b) onto a c-Si substrate and from a few monolayers to 400 Angstrom thick. The film composition during deposition was estimated by in-situ spectroscopic ellipsometry (SE), a nondestructive technique, in the energy region 1.5-5.5 eV. It was found that films deposited with negative bias are rich in sp(3) C-C sites from the initial stages of growth to the final thickness of the film. All films were also examined by X-ray reflectometry and atomic force microscopy in order to study the surface morphology versus V-b and the film thickness. The results show that films deposited with negative bias are atomically smooth and independent on their thickness, whereas those deposited with positive bias exhibit spherical elements with size depending on the film thickness. Their RMS surface roughness is about 5 Angstrom at the first 30 Angstrom and increases linearly to 9 k for films 400 A thick. These results support that two type of growth take place in a-C films deposited by sputtering and are discussed in view of reported models for the development of films rich in sp(3) C-C sites. (C) 1998 Elsevier Science S.A.
引用
收藏
页码:486 / 490
页数:5
相关论文
共 16 条
[1]   OPTICAL-PROPERTIES OF THIN-FILMS [J].
ASPNES, DE .
THIN SOLID FILMS, 1982, 89 (03) :249-262
[2]  
Azzam R., 1977, ELLIPSOMETRY POLARIZ
[3]   A SIMPLE-MODEL FOR THE FORMATION OF COMPRESSIVE STRESS IN THIN-FILMS BY ION-BOMBARDMENT [J].
DAVIS, CA .
THIN SOLID FILMS, 1993, 226 (01) :30-34
[4]  
HUANG TC, 1994, ADV X RAY ANAL, V37, P183
[5]   SUBSTANTIATION OF SUBPLANTATION MODEL FOR DIAMOND-LIKE FILM GROWTH BY ATOMIC-FORCE MICROSCOPY [J].
LIFSHITZ, Y ;
LEMPERT, GD ;
GROSSMAN, E .
PHYSICAL REVIEW LETTERS, 1994, 72 (17) :2753-2756
[6]   Amorphous carbon films rich in diamond deposited by magnetron sputtering [J].
Logothetidis, S ;
Gioti, M .
MATERIALS SCIENCE AND ENGINEERING B-SOLID STATE MATERIALS FOR ADVANCED TECHNOLOGY, 1997, 46 (1-3) :119-123
[7]   Hydrogen-free amorphous carbon films approaching diamond prepared by magnetron sputtering [J].
Logothetidis, S .
APPLIED PHYSICS LETTERS, 1996, 69 (02) :158-160
[8]   The optical properties of a-C:H films between 1.5 and 10 eV and the effect of thermal annealing on the film character [J].
Logothetidis, S ;
Petalas, J ;
Ves, S .
JOURNAL OF APPLIED PHYSICS, 1996, 79 (02) :1040-1050
[9]   FILTERED ARC DEPOSITION OF AMORPHOUS DIAMOND [J].
LOSSY, R ;
PAPPAS, DL ;
ROY, RA ;
CUOMO, JJ .
APPLIED PHYSICS LETTERS, 1992, 61 (02) :171-173
[10]  
LUCAS CA, 1991, APPL PHYS LETT, V59, P2100, DOI 10.1063/1.106093