Mode control in vertical-cavity surface-emitting lasers by post-processing using focused ion-beam etching

被引:23
作者
Dowd, P
Raddatz, L
Sumaila, Y
Asghari, M
White, IH
Heard, PJ
Allen, GC
Schneider, RP
Tan, MRT
Wang, SY
机构
[1] UNIV BRISTOL,INTERFACE ANAL CTR,BRISTOL BS2 8BS,AVON,ENGLAND
[2] HEWLETT PACKARD LABS,PALO ALTO,CA 94303
基金
英国工程与自然科学研究理事会;
关键词
focused ion-beam etching; reflectivity engineering; transverse mode control; vertical-cavity surface-emitting lasers;
D O I
10.1109/68.618474
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
Single-mode emission is achieved in previously multimode gain-guided vertical-cavity surface-emitting lasers (VCSEL's) by localized modification of the mirror reflectivity using focused ion-beam etching. Reflectivity engineering is also demonstrated to suppress transverse mode emission in an oxide-confined device, reducing the spectral width from 1.2 nm to less than 0.5 nm.
引用
收藏
页码:1193 / 1195
页数:3
相关论文
共 12 条
[1]   GAIN-DEPENDENT POLARIZATION PROPERTIES OF VERTICAL-CAVITY LASERS [J].
CHOQUETTE, KD ;
SCHNEIDER, RP ;
LEAR, KL ;
LEIBENGUTH, RE .
IEEE JOURNAL OF SELECTED TOPICS IN QUANTUM ELECTRONICS, 1995, 1 (02) :661-666
[2]   CONTROL OF VERTICAL-CAVITY LASER POLARIZATION WITH ANISOTROPIC TRANSVERSE CAVITY GEOMETRIES [J].
CHOQUETTE, KD ;
LEIBENGUTH, RE .
IEEE PHOTONICS TECHNOLOGY LETTERS, 1994, 6 (01) :40-42
[3]   Simultaneous and independent semiconductor laser operation at 1.3 and 1.55 mu m produced by focused ion beam etching [J].
Gardiner, CK ;
Kozlowski, DA ;
England, JMC ;
Plumb, RGS .
ELECTRONICS LETTERS, 1996, 32 (20) :1891-1892
[4]   HYBRID DIELECTRIC ALGAAS MIRROR SPATIALLY FILTERED VERTICAL-CAVITY TOP-SURFACE EMITTING LASER [J].
MORGAN, RA ;
HIBBSBRENNER, MK ;
LEHMAN, JA ;
KALWEIT, EL ;
WALTERSON, RA ;
MARTA, TM ;
AKINWANDE, T .
APPLIED PHYSICS LETTERS, 1995, 66 (10) :1157-1159
[5]   FOCUSED ION-BEAMS MICROFABRICATION METHODS AND APPLICATIONS (INVITED) [J].
PREWETT, PD .
VACUUM, 1993, 44 (3-4) :345-351
[6]  
RADDATZ L, 1995, LEOS 95, V2, P439
[7]   Oxide-confined 850nm vertical-cavity lasers for multimode-fibre data communications [J].
Schneider, RP ;
Tan, MRT ;
Corzine, SW ;
Wang, SY .
ELECTRONICS LETTERS, 1996, 32 (14) :1300-1302
[8]  
TAN MRT, 1995, P LEOS 96, V1, P107
[9]   SYMMETRY CONSIDERATIONS IN VERTICAL-CAVITY SURFACE-EMITTING LASERS - PREDICTION OF REMOVAL OF POLARIZATION ISOTROPICITY ON (001) SUBSTRATES [J].
VAKHSHOORI, D .
APPLIED PHYSICS LETTERS, 1994, 65 (03) :259-261
[10]   SPATIAL HOLE-BURNING AND SELF-FOCUSING IN VERTICAL-CAVITY SURFACE-EMITTING LASER-DIODES [J].
WILSON, GC ;
KUCHTA, DM ;
WALKER, JD ;
SMITH, JS .
APPLIED PHYSICS LETTERS, 1994, 64 (05) :542-544