Investigation of hybrid pixel detector arrays by synchrotron-radiation imaging

被引：45

作者：

Helfen, L. ^{[1
]}

Myagotin, A.

Pernot, P.

DiMichiel, M.

Mikulik, P.

Berthold, A.

Baumbach, T.

机构：

[1] Forschungszentrum Karlsruhe, Inst Synchrotronstrahlung, ISS, ANKA, D-76344 Eggenstein Leopoldshafen, Germany

[2] European Synchrotron Radiat Facil, F-38043 Grenoble 9, France

[3] Masaryk Univ, Inst Condensed Matter Phys, CZ-61137 Brno, Czech Republic

[4] Fraunhofer Inst Zerstorungsfreie Prufverfahren, IZFPD, D-01326 Dresden, Germany

来源：

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION A-ACCELERATORS SPECTROMETERS DETECTORS AND ASSOCIATED EQUIPMENT | 2006年 / 563卷 / 01期

关键词：

semiconductor detectors; microsystem technology; X-ray imaging; COMPUTED LAMINOGRAPHY;

D O I：

10.1016/j.nima.2006.01.085

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

Synchrotron-radiation imaging was applied to the non-destructive testing of detector devices during their development cycle. Transmission imaging known as computed laminography was used to examine the microstructure of the interconnections in order to investigate the perfection of technological steps necessary for hybrid detector production. A characterisation of the solder bump microstructure can reveal production flaws such as missing or misaligned bumps, voids in bumps or bridges and thus give valuable information about the bonding process. (c) 2006 Elsevier B.V. All rights reserved.

引用

页码：163 / 166

页数：4

共 10 条

[1] Holotomography: Quantitative phase tomography with micrometer resolution using hard synchrotron radiation x rays [J].

Cloetens, P ;

Ludwig, W ;

Baruchel, J ;

Van Dyck, D ;

Van Landuyt, J ;

Guigay, JP ;

Schlenker, M .

APPLIED PHYSICS LETTERS, 1999, 75 (19) :2912-2914

[2] Observation of microstructure and damage in materials by phase sensitive radiography and tomography [J].

Cloetens, P ;

PateyronSalome, M ;

Buffiere, JY ;

Peix, G ;

Baruchel, J ;

Peyrin, F ;

Schlenker, M .

JOURNAL OF APPLIED PHYSICS, 1997, 81 (09) :5878-5886

[3] REPRESENTATION OF A FUNCTION BY ITS LINE INTEGRALS WITH SOME RADIOLOGICAL APPLICATIONS [J].

CORMACK, AM .

JOURNAL OF APPLIED PHYSICS, 1963, 34 (09) :2722-&

[4] Digital x-ray tomosynthesis: current state of the art and clinical potential [J].

Dobbins, JT ;

Godfrey, DJ .

PHYSICS IN MEDICINE AND BIOLOGY, 2003, 48 (19) :R65-R106

[5] High-resolution three-dimensional imaging of flat objects by synchrotron-radiation computed laminography -: art. no. 071915 [J].

Helfen, L ;

Baumbach, T ;

Mikulík, P ;

Kiel, D ;

Pernot, P ;

Cloetens, P ;

Baruchel, J .

APPLIED PHYSICS LETTERS, 2005, 86 (07) :1-3

[6]

HELFEN L, 2004, P 16 WORLD C NOND TE

[7]

Hounsfield G.N., 1972, British Patent, Patent No. [GB1283915, 1283915]

[8] A theoretical framework for filtered backprojection in tomosynthesis [J].

Lauritsch, G ;

Harer, WH .

MEDICAL IMAGING 1998: IMAGE PROCESSING, PTS 1 AND 2, 1998, 3338 :1127-1137

[9] X-ray microscopy in Zernike phase contrast mode at 4 keV photon energy with 60 nm resolution [J].

Neuhäusler, U ;

Schneider, G ;

Ludwig, W ;

Meyer, MA ;

Zschech, E ;

Hambach, D .

JOURNAL OF PHYSICS D-APPLIED PHYSICS, 2003, 36 (10A) :A79-A82

[10] Computed laminography for materials testing [J].

Zhou, J ;

Maisl, M ;

Reiter, H ;

Arnold, W .

APPLIED PHYSICS LETTERS, 1996, 68 (24) :3500-3502

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