Effects of annealing on electronic and structural characteristics of pentacene thin-film transistors on polyimide gate dielectrics

被引:27
作者
Fukuda, Kenjiro [1 ]
Sekitani, Tsuyoshi
Someya, Takao
机构
[1] Univ Tokyo, Dept Elect & Elect Engn, Bunkyo Ku, Tokyo 1138656, Japan
关键词
annealing; carrier mobility; crystal structure; organic semiconductors; semiconductor thin films; thin film transistors; X-ray diffraction; FIELD-EFFECT TRANSISTORS; LARGE-AREA; DISPLAYS;
D O I
10.1063/1.3179166
中图分类号
O59 [应用物理学];
学科分类号
摘要
We have systematically investigated the effects of annealing on the structures and electronic performances of pentacene field-effect transistors on polyimide gate dielectric layers. The mobility of these transistors increases from 0.07 to 0.12 cm(2)/V s by annealing at 140 degrees C. The density of charge traps can be reduced by annealing, thereby resulting in the improvement of the transistor characteristics. The x-ray diffraction measurements indicate that the crystal structure of pentacene on polyimide does not change after annealing up to 140 degrees C, while the crystal structure of pentacene on Si/SiO2 exhibits transitions from the (001) thin film phase to the bulk phase.
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页数:3
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