共 10 条
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Fabrication of planar quantum magnetic disk structure using electron beam lithography, reactive ion etching, and chemical mechanical polishing
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JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B,
1995, 13 (06)
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[9]
Fabrication of ultrasmall magnets by electroplating
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JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B,
1995, 13 (06)
:2372-2375