Enhanced light extraction in III-nitride ultraviolet photonic crystal light-emitting diodes

被引：127

作者：

Shakya, J ^{[1
]}

Kim, KH ^{[1
]}

Lin, JY ^{[1
]}

Jiang, HX ^{[1
]}

机构：

[1] Kansas State Univ, Dept Phys, Manhattan, KS 66506 USA

来源：

APPLIED PHYSICS LETTERS | 2004年 / 85卷 / 01期

基金：

美国国家科学基金会;

关键词：

D O I：

10.1063/1.1768297

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

III-nitride photonic crystal (PC) ultraviolet (UV) light-emitting diodes (LEDs) were fabricated. Triangular arrays of the PCs with different diameters/periodicities were patterned using electron-beam lithography and inductively coupled plasma dry etching. The optical power output of LEDs was enhanced by a factor of 2.5 due to PC formation. It was observed that the optical enhancement factor depends strongly on the lattice constant and hole size of the PCs. The achievement of nitride PCs is expected to benefit many applications of III-nitride optoelectronics, particularly for the improvement of extraction efficiency in III-nitride deep-UV emitters (lambda<340 nm), which are crucial for many important applications, but presently have a very low quantum efficiency. (C) 2004 American Institute of Physics.

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页码：142 / 144

页数：3

相关论文

共 12 条

[1] Light-emitting diode extraction efficiency [J].

Boroditsky, M ;

Yablonovitch, E .

LIGHT-EMITTING DIODES: RESEARCH, MANUFACTURING, AND APPLICATIONS, 1997, 3002 :119-122

[2] Light extraction from optically pumped light-emitting diode by thin-slab photonic crystals [J].

Boroditsky, M ;

Krauss, TF ;

Coccioli, R ;

Vrijen, R ;

Bhat, R ;

Yablonovitch, E .

APPLIED PHYSICS LETTERS, 1999, 75 (08) :1036-1038

[3] Enhanced coupling to vertical radiation using a two-dimensional photonic crystal in a semiconductor light-emitting diode [J].

Erchak, AA ;

Ripin, DJ ;

Fan, S ;

Rakich, P ;

Joannopoulos, JD ;

Ippen, EP ;

Petrich, GS ;

Kolodziejski, LA .

APPLIED PHYSICS LETTERS, 2001, 78 (05) :563-565

[4] High extraction efficiency of spontaneous emission from slabs of photonic crystals [J].

Fan, SH ;

Villeneuve, PR ;

Joannopoulos, JD ;

Schubert, EF .

PHYSICAL REVIEW LETTERS, 1997, 78 (17) :3294-3297

[5] InGaN/GaN quantum well interconnected microdisk light emitting diodes [J].

Jin, SX ;

Li, J ;

Lin, JY ;

Jiang, HX .

APPLIED PHYSICS LETTERS, 2000, 77 (20) :3236-3238

[6]

JOANNOPOULOS JD, 1995, PHOTONIC CRYSTALS MO, P65107

[7] III-nitride ultraviolet light-emitting diodes with delta doping [J].

Kim, KH ;

Li, J ;

Jin, SX ;

Lin, JY ;

Jiang, HX .

APPLIED PHYSICS LETTERS, 2003, 83 (03) :566-568

[8] III-nitride blue and ultraviolet photonic crystal light emitting diodes [J].

Oder, TN ;

Kim, KH ;

Lin, JY ;

Jiang, HX .

APPLIED PHYSICS LETTERS, 2004, 84 (04) :466-468

[9] III-nitride photonic crystals [J].

Oder, TN ;

Shakya, J ;

Lin, JY ;

Jiang, HX .

APPLIED PHYSICS LETTERS, 2003, 83 (06) :1231-1233

[10] Enhancement of light extraction from two-dimensional photonic crystal slab structures [J].

Ryu, HY ;

Hwang, JK ;

Lee, YJ ;

Lee, YH .

IEEE JOURNAL OF SELECTED TOPICS IN QUANTUM ELECTRONICS, 2002, 8 (02) :231-237