Enhanced diffraction efficiency of gratings in multilayers

被引：8

作者：

Escoubas, L ^{[1
]}

Flory, F ^{[1
]}

Lemarchand, F ^{[1
]}

During, A ^{[1
]}

Roux, L ^{[1
]}

机构：

[1] Ecole Natl Super Phys Marseille, Equipe Composants Opt Microstruct, Lab Opt Surfaces & Couches Minches, CNRS,UPRES 6080, F-13397 Marseille 20, France

来源：

OPTICS LETTERS | 2000年 / 25卷 / 04期

关键词：

D O I：

10.1364/OL.25.000194

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

Computations with the rigorous differential method show that single gratings made by ion implantation have a diffraction efficiency in the + 1 transmitted order under TE illumination of only 0.78%. The insertion of such gratings into multilayer dielectric Fabry-Perot cavities leads to an enhancement of the free-space diffraction efficiency. Different designs for the multilayer are considered. An 18.8% efficiency is reached with Ii-layer mirrors. This result is obtained by optimization of the thickness of the spacer of the Fabry-Perot cavity that contains the grating and centering of the wavelength of the mirrors. The dependence of optical properties of the structure on the various optogeometrical parameters of the structure is discussed. (C) 2000 Optical Society of America OCIS codes: 050.1950, 050.1970, 050.2230.

引用

页码：194 / 196

页数：3

共 12 条

[1] High-efficiency subwavelength diffractive element patterned in a high-refractive-index material for 633 nm [J].