Electron beam recording with a novel differential pumping head realizing over 50GB/layer capacity disc

被引：10

作者：

Takeda, M ^{[1
]}

Furuki, M ^{[1
]}

Yamamoto, M ^{[1
]}

Aki, Y ^{[1
]}

Kawase, H ^{[1
]}

Koizumi, M ^{[1
]}

Takashima, S ^{[1
]}

Miyokawa, T ^{[1
]}

Date, N ^{[1
]}

机构：

[1] Sony Corp, AV IT Dev Grp, Opt Disc Dev Div, Shinagawa Ku, Tokyo 1410001, Japan

来源：

ISOM/ODS 2002: INTERNATIONAL SYMPOSIUM ON OPTICAL MEMORY AND OPTICAL DATA STORAGE TOPICAL MEETING, TECHNICAL DIGEST | 2002年

关键词：

D O I：

10.1109/OMODS.2002.1028553

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

引用

页码：18 / 20

页数：3

共 6 条

[1]

ICHIMURA I, 2001, OPT DAT STOR C NEW M, P139

[2] Near-field optical head for disc mastering process [J].

Imanishi, S ;

Ishimoto, T ;

Aki, Y ;

Kondo, T ;

Kishima, K ;

Yamamoto, K ;

Yamamoto, M .

JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 2000, 39 (2B) :800-805

[3]

SAITO K, 2001, INT S OPTICAL MEMORY, P244

[4]

SHINODA M, UNPUB ISOMODS2002

[5] Deep UV mastering using an all-solid-state 266 nm laser for an over 20 GBytes/layer capacity disk [J].

Takeda, M ;

Furuki, M ;

Yamatsu, H ;

Kashiwagi, T ;

Aki, Y ;

Suzuki, A ;

Kondo, K ;

Oka, M ;

Kubota, S .

JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 1999, 38 (3B) :1837-1838

[6] High-density recording using an electron beam recorder [J].

Wada, Y ;

Katsumura, M ;

Kojima, Y ;

Kitahara, H ;

Iida, T .

JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS, 2001, 40 (3B) :1653-1660

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