High-density recording using an electron beam recorder

被引：53

作者：

Wada, Y ^{[1
]}

Katsumura, M ^{[1
]}

Kojima, Y ^{[1
]}

Kitahara, H ^{[1
]}

Iida, T ^{[1
]}

机构：

[1] Pioneer Corp, Corp Res & Dev Labs, Tsurugashimashi, Saitama 3502288, Japan

来源：

JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS | 2001年 / 40卷 / 3B期

关键词：

optical disk; electron beam; high-density recording; mastering; jitter; beam blanker;

D O I：

10.1143/JJAP.40.1653

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

A high-density optical disk fabricated using electron beam mastering exhibited excellent performance. Read-only disks with the recording capacity of 25 to 30 GB were fabricated by electron beam mastering and their jitter values were evaluated by a blue laser read out system. As a result, very low jitter values of 5.4, 6.2 and 7.7% were obtained for the disks whose capacity was 25, 27.5 and 30 GB, respectively. Characteristics of the disks such as track pitch variation, track roundness and recording stability are also shown. The electron beam recorder used in the experiments is described. In particular. details of the electron beam column, properties of the beam, how to adjust and evaluate the beam and a beam blanker are presented. Finally, several problems are addressed.

引用

页码：1653 / 1660

页数：8

共 11 条

[1] ON THE DESIGN AND EFFECTIVE STRENGTH OF STIGMATORS FOR ELECTRON-BEAM LITHOGRAPHY [J].

GESLEY, M ;

DEVORE, W .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1991, 9 (06) :2977-2980

[2] Near-field optical head for disc mastering process [J].

Imanishi, S ;

Ishimoto, T ;

Aki, Y ;

Kondo, T ;

Kishima, K ;

Yamamoto, K ;

Yamamoto, M .

JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 2000, 39 (2B) :800-805

[3] High density recording using Electron Beam Recorder [J].

Katsumura, M ;

Iida, T .

2000 OPTICAL DATA STORAGE, CONFERENCE DIGEST, 2000, :3-5

[4]

KATSUMURA M, 2000, ISOM 2000, P18

[5] A SCHOTTKY-EMITTER ELECTRON SOURCE FOR WIDE-RANGE LITHOGRAPHY APPLICATIONS [J].

KOEK, BH ;

CHISHOLM, T ;

DAVEY, JP ;

ROMIJN, J ;

VONRUN, AJ .

JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS, 1993, 32 (12B) :5982-5987

[6] High density mastering using electron beam [J].

Kojima, Y ;

Kitahara, H ;

Kasono, O ;

Katsumura, M ;

Wada, Y .

JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 1998, 37 (4B) :2137-2143

[7] HIGH-SPEED BEAM DEFLECTION AND BLANKING FOR ELECTRON LITHOGRAPHY [J].

LIN, LH ;

BEAUCHAMP, HL .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1973, 10 (06) :987-990

[8] New equalizer to improve signal-to-noise ratio [J].

Miyanabe, S ;

Kuribayashi, H ;

Yamamoto, K .

JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 1999, 38 (3B) :1715-1719

[9]

ONDA H, 1999, NIPPON SEIMITSU KOUG, V65, P1158

[10] Deep UV mastering with a write compensation technique realizing over 20 GB/layer capacity disc [J].

Takeda, M ;

Furuki, M ;

Ishimoto, T ;

Kondo, K ;

Yamamoto, M ;

Kubota, S .

JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 2000, 39 (2B) :797-799

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