Photopatterning of thermally sensitive hydrogels useful for microactuators

被引:140
作者
Hoffmann, J
Plötner, M [1 ]
Kuckling, D
Fischer, WJ
机构
[1] Dresden Univ Technol, Lab Semicond Technol & Microsyst, D-01062 Dresden, Germany
[2] Dresden Univ Technol, Inst Macromol Chem & Text Chem, D-01062 Dresden, Germany
关键词
microactuator; hydrogel; PNIPAAm; photocrosslinking;
D O I
10.1016/S0924-4247(99)00080-1
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
Hydrogels based on PNIPAAm [poly-(N-isopropylacrylamide)] are an attractive working material for microactuators because of their swelling with thermally induced phase transitions leading to a very high volume expansion. By the employment of co-polymerization with a chromophore, a specially designed polymer has been developed that can be photocrosslinked to a gel and by this photopatterned. The focal point of this work is the preparation and characterization of mircopattems using this co-polymer. The efficiency of the photochemical reaction is quite good and patterning results down to 20 mu m spices have been achieved. The swelling of dot-like patterned hydrogel films on Si/SiO2 substrates in water occurs with similar temperature dependency and a swelling ratio of 3 to 3.5 in the same order of magnitude compared to bulk PNIPAAm-based gels, but the transition time of 2 to 8 s measured at the gelous dots is much shorter than that of macroscopic objects, making the material interesting for microactuator performance. The transition temperature decreases from 32 to 34 degrees C at pure PNIPAAm to 18 to 20 degrees C at the photopatterned gels of the copolymer. (C) 1999 Elsevier Science S.A. All rights reserved.
引用
收藏
页码:139 / 144
页数:6
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