Ferroelectric capacitors made by a laser forward transfer technique

Ferroelectric capacitors have been fabricated using a novel laser based transfer technique called Matrix Assisted Pulsed Laser Evaporation-Direct Write (MAPLE-DW) with the dielectric films thermally processed by selective laser sintering. MAPLE-DW is a versatile direct writing technique capable of writing a wide variety of materials on virtually any substrate under ambient conditions. Lead magnesium niobate (PMN) based dielectric films were deposited by MAPLE-DW on metallized alumina and kapton substrates under ambient conditions. Infrared CW C02 (lambda = 10.6 mum) laser was used for thermal processing of the dielectric films. Electrical characteristics of these MAPLE-DW deposited capacitors were studied over a wide frequency range (1 MHz to 1.8 GHz).