Gas sensors based on deposited single-walled carbon nanotube networks for DMMP detection

被引：118

作者：

Wang, Yanyan ^{[1
]}

Zhou, Zhihua ^{[1
]}

Yang, Zhi ^{[1
]}

Chen, Xiaohang ^{[1
]}

Xu, Dong ^{[1
]}

Zhang, Yafei ^{[1
]}

机构：

[1] Shanghai Jiao Tong Univ, Minist Educ, Res Inst Micro Nano Sci & Technol, Natl Key Lab Nano Micro Fabricat Technol,Key Lab, Shanghai 200240, Peoples R China

来源：

NANOTECHNOLOGY | 2009年 / 20卷 / 34期

基金：

中国国家自然科学基金;

关键词：

CHEMICAL WARFARE AGENT; NERVE AGENT; ACOUSTIC-WAVE; ARRAYS; CLASSIFICATION; ADSORPTION; SIMULANTS; POLYMERS; DEVICES; VAPORS;

D O I：

10.1088/0957-4484/20/34/345502

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

Sensors based on single-walled carbon nanotube (SWNT) networks were fabricated and their sensitive properties for the nerve agent stimulant dimethyl methylphosphonate (DMMP) vapor were investigated at room temperature. The SWNT networks were deposited on oxidized silicon surface functionalized with 3-aminopropyltrimethysilane (APS). Combining with a traditional silicon process, SWNT-based gas sensors were made at a wafer scale. The effects of the density of deposited SWNTs on the sensor response were studied. The excellent response is obtained under a density of 30-40 tubes mu m(-2). The sensors exhibit high resistance response, fast response time, rapid recovery and good reproducibility for DMMP vapor. The deposited SWNT sensors will be potentially extended to large-scale fabrication.

引用

页数：8

共 45 条

[1]

[Anonymous], NANOTECHNOL

[2]

ATKINS PW, 1994, PHYS CHEM, P15103

[3] Carbon nanotubes - the route toward applications [J].