A cheap and quickly adaptable in situ electrical contacting TEM sample holder design

被引:2
作者
Boerrnert, Felix [1 ,2 ]
Voigtlaender, Ralf [2 ]
Rellinghaus, Bernd [2 ]
Buechner, Bernd [2 ]
Ruemmeli, Mark H. [2 ]
Lichte, Hannes [1 ]
机构
[1] Tech Univ Dresden, Speziallab Triebenberg, D-01062 Dresden, Germany
[2] IFW Dresden, D-01171 Dresden, Germany
关键词
In situ TEM; TEM sample holder; Electrical contacting; HIGH BIAS; GRAPHENE; MICROSCOPY; CARBON;
D O I
10.1016/j.ultramic.2014.01.001
中图分类号
TH742 [显微镜];
学科分类号
摘要
In situ electrical characterization of nanostructures inside a transmission electron microscope provides crucial insight into the mechanisms of functioning micro- and nano-electronic devices. For such in situ investigations specialized sample holders are necessary. A simple and affordable but flexible design is important, especially, when sample geometries change, a holder should be adaptable with minimum effort. Atomic resolution imaging is standard nowadays, so a sample holder must ensure this capability. A sample holder design for on-chip samples is presented that fulfils these requisites. On-chip sample devices have the advantage that they can be manufactured via standard fabrication routes. (C) 2014 Elsevier B.V. All rights reserved.
引用
收藏
页码:1 / 4
页数:4
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