Surface-free technology by laser annealing (SUFTLA) and its application to poly-Si TFT-LCDs on plastic film with integrated drivers

被引：102

作者：

Inoue, S ^{[1
]}

Utsunomiya, S ^{[1
]}

Saeki, T ^{[1
]}

Shimoda, T ^{[1
]}

机构：

[1] Seiko Epson Corp, Technol Platform Res Ctr, Nagano 3990293, Japan

来源：

IEEE TRANSACTIONS ON ELECTRON DEVICES | 2002年 / 49卷 / 08期

关键词：

ablation; annealing; integrated drivers; laser; liquid crystal display (LCD); plastic; polycrystalline-silicon thin-film transistor (polysilicon TFT); substrate; thin film; transfer;

D O I：

10.1109/TED.2002.801294

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

In order to realize electronic devices on plastic film, new technology has been developed that enables the transfer of thin-film devices from an original substrate to another substrate by using laser irradiation. This technology was termed SUFTLA, which stands for surface-free technology by laser annealing. A polycrystalline-silicon thin film transistor (poly-Si TFT) back-plane for liquid crystal displays (LCDs) with integrated drivers was fabricated using a low-temperature process (below 425 degreesC) and could be successfully transferred from a glass or quartz substrate to plastic film using this technology. This technology enabled us to fabricate an all-plastic substrate TFT-LCD having a display area of 0.7 in measured diagonally and a pixel count of 428 x 238. In addition, the operation of the integrated drivers and the displayed image could be confirmed for the first time in the world.

引用

页码：1353 / 1360

页数：8

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