Effective transverse piezoelectric coefficient e31,f of (100)/(001) textured PZT thin films

被引：5

作者：

Ledermann, N ^{[1
]}

Seifert, A ^{[1
]}

Hiboux, S ^{[1
]}

Muralt, P ^{[1
]}

机构：

[1] Swiss Fed Inst Technol, Ceram Lab, CH-1015 Lausanne, Switzerland

来源：

INTEGRATED FERROELECTRICS | 1999年 / 24卷 / 1-4期

关键词：

piezoelectricity; thin films; PZT; ferroelectricity; poling;

D O I：

10.1080/10584589908215574

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

Effective transverse piezoelectric coefficient e(31,f) has been measured on (100)/(001) sol-gel Pb(ZrXTi1-X) thin films with compositions between 30% and 45% Zr. A maximum value of 8.07 +/- 0.36 C/m(2) at 40% Zr is found. The influence of the poling field ranging from 50 kV/cm to 250 kV/cm has been evaluated.

引用

页码：13 / 18

页数：6

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