Comparing glass and plastic refractive microlenses fabricated with different technologies

被引:146
作者
Ottevaere, H.
Cox, R.
Herzig, H. P.
Miyashita, T.
Naessens, K.
Taghizadeh, M.
Voelkel, R.
Woo, H. J.
Thienpont, H.
机构
[1] Vrije Univ Brussels, Dept Appl Phys & Photon TONA IR, B-1050 Brussels, Belgium
[2] MicroFab Technol Inc, Plano, TX 75074 USA
[3] Univ Neuchatel, Inst Microtechnol, CH-2000 Neuchatel, Switzerland
[4] Ricoh Co Ltd, Res & Dev Grp, Kohoku Ku, Yokohama, Kanagawa 2228530, Japan
[5] Univ Ghent, IMEC, Dept Informat Technol, B-9000 Ghent, Belgium
[6] Heriot Watt Univ, Sch Engn & Phys Sci, Edinburgh EH14 4AS, Midlothian, Scotland
[7] SUSS MicroOpt SA, CH-2007 Neuchatel, Switzerland
[8] Korea Inst Geosci & Mineral Resources, Taejon 305350, South Korea
来源
JOURNAL OF OPTICS A-PURE AND APPLIED OPTICS | 2006年 / 8卷 / 07期
关键词
microlenses; interferometry; optical characterization; refractive optics; fabrication technologies;
D O I
10.1088/1464-4258/8/7/S18
中图分类号
O43 [光学];
学科分类号
070207 ; 0803 ;
摘要
We review the most important fabrication techniques for glass and plastic refractive microlenses and we quantitatively characterize in a systematic way the corresponding state-of-the-art microlenses, which we obtained from selected research groups. For all our measurements we rely on three optical instruments: a non-contact optical profiler, a transmission Mach-Zehnder interferometer and a Twyman-Green interferometer. To conclude, we survey and discuss the different fabrication techniques by comparing the geometrical and optical characteristics of the microlenses, the range of materials in which the lenses can be produced, their potential for low-cost fabrication through mass-replication techniques and their suitability for monolithic integration with other micro-optical components.
引用
收藏
页码:S407 / S429
页数:23
相关论文
共 55 条
  • [1] BAHR J, 1994, APPL OPTICS, V33, P5919, DOI 10.1364/AO.33.005919
  • [2] Bähr J, 2001, P SOC PHOTO-OPT INS, V4455, P281, DOI 10.1117/12.450452
  • [3] BEICH WS, 2002, PHOTONICS SPECTRA, V40
  • [4] Micro-lens arrays generated by UV laser irradiation of doped PMMA
    Beinhorn, F
    Ihlemann, J
    Luther, K
    Troe, J
    [J]. APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING, 1999, 68 (06): : 709 - 713
  • [5] PHOTOLYTIC TECHNIQUE FOR PRODUCING MICROLENSES IN PHOTOSENSITIVE GLASS
    BORRELLI, NF
    MORSE, DL
    BELLMAN, RH
    MORGAN, WL
    [J]. APPLIED OPTICS, 1985, 24 (16): : 2520 - 2525
  • [6] BORRELLI NF, 1999, MICROOPTICS TECHNOLO
  • [7] H+ LITHOGRAPHY FOR 3-D INTEGRATION OF OPTICAL CIRCUITS
    BRENNER, KH
    FRANK, M
    KUFNER, M
    KUFNER, S
    [J]. APPLIED OPTICS, 1990, 29 (26): : 3723 - 3724
  • [8] Microjet printing of high precision microlens array for packaging of fiber-optic components
    Chen, T
    Cox, WR
    Lenhard, D
    Hayes, DJ
    [J]. OPTOELECTRONIC INTERCONNECTS, INTEGRATED CIRCUITS, AND PACKAGING, 2002, 4652 : 136 - 141
  • [9] Micro-optics fabrication by ink-jet printing
    Cox, W. Royall
    Chen, Ting
    Hayes, Donald J.
    [J]. Optics and Photonics News, 2001, 12 (06) : 32 - 35
  • [10] Microjet printing of micro-optical interconnects and sensors
    Cox, WR
    Guan, C
    Hayes, DJ
    [J]. OPTOELECTRONIC INTERCONNECTS VII; PHOTONICS PACKAGING AND INTEGRATION II, 2000, 3952 : 400 - 407